Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Fujitsu Corporation (1 from 39,248 patents)
2. Fujitsu Semiconductor Limited (1 from 1,674 patents)
2 patents:
1. 7906033 - Plasma etching method and apparatus
2. 6926800 - Plasma etching method and apparatus