Ebara Corporation

Koji Atoh

Fumitoshi Oikawa

Yuki Inoue

Hiroshi Sotozaki

Tatsuo Inoue

A cleaning apparatus for cleaning a substrate includes a cleaning member, a cleaning member carrier for holding the cleaning member and bringing the cleaning member into contact with a substrate to be cleaned, and a sensor for detecting a presence/absence of a cleaning held by the cleaning member carrier. The substrate is cleaned by causing relative movement between the cleaning member and the substrate while keeping the cleaning member and the substrate in contact with each other.

Substrate cleaning apparatus and cleaning member

A substrate cleaning apparatus for cleaning a rotating substrate has a scrub cleaning tool for cleaning the substrate by bringing the cleaning tool into contact with the substrate, a liquid jet spray nozzle for cleaning the substrate by yet-spraying a cleaning liquid from the nozzle to the substrate, and a swing mechanism for simultaneously swinging both of the scrub cleaning tool and the liquid jet spray nozzle on and above the substrate. The substrate cleaning apparatus also has a cleaning tool vertical driving mechanism for moving at least the cleaning tool from a position where the cleaning tool is in contact with a surface of the substrate to another position where the cleaning liquid jet-sprayed from the nozzle is applied to the cleaning tool, by vertically moving the cleaning tool.

Substrate cleaning apparatus

A substrate cleaning apparatus comprises a side surface cleaning member and a peripheral edge cleaning member. The side surface cleaning member includes a cylindrical scrub cleaning body having a cylindrical surface and opposite ends. The cylindrical scrub cleaning body is adapted to be rotated about its axis with the cylindrical surface thereof engaged with a side surface of a substrate to be cleaned to effect scrub cleaning of the side surface. The peripheral edge cleaning member is adapted to be engaged with a peripheral edge of the substrate to effect scrub cleaning of the peripheral edge. The peripheral edge cleaning member is attached to one of the opposite ends of the cylindrical scrub cleaning body so as to be rotated along with the cylindrical scrub cleaning body about the axis of the cylindrical scrub cleaning body. The peripheral edge cleaning member comprises a sponge member adapted to be engaged with and scrub the peripheral edge of the substrate. The cylindrical scrub cleaning body may also be made of a sponge member and integrally formed with the sponge member comprising the peripheral edge cleaning member. The peripheral cleaning member may comprise a plurality of bristles instead of the cylindrical sponge member.

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Kawasaki, Japan

Koji Atoh