Canon Kabushiki Kaisha

Koichi Iwao

Eiki Aoyama

A semiconductor integrated circuit inputs and outputs signals regarding a test using two terminals, having a bidirectional terminal for input and output of data and an input terminal for input of a clock signal. A signal is output via the bidirectional terminal in accordance with an output control signal output from an output control circuit. The output control circuit performs control in synchronization with the clock signal to prevent data input to the bidirectional terminal and an output permission signal based on the output control signal from overlapping each other.

Semiconductor integrated circuit, method of testing the semiconductor integrated circuit, and semiconductor substrate

An inspection apparatus includes a plurality of BIST circuits, each BIST circuit being configured to compare a test pattern output from an inspection target circuit with an expected value and output a signal indicating a comparison result, and a combining unit configured to generate one signal by performing a logical operation on a plurality of the signals indicating the comparison results which are output from the plurality of BIST circuits. The combining unit includes a plurality of level inspection circuits each configured to perform a level inspection of detecting a stuck-at fault. Each of the plurality of BIST circuits is connected to a corresponding one of the plurality of level inspection circuits.

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Kodaira, Japan

Koichi Iwao