Jeol Ltd.

Kimio Ohi

Seiichi Suzuki

Toru Kasai

Kiyoshi Miyashita

Takeshi Tomita

Yoshiyasu Harada

Masashi Iwatsuki

Kazuma Suzuki

Tohru Kasai

A side-entry specimen holder for use with a transmission electron microscope. The holder comprises a specimen-holding plate and an insertion rod. The holding plate is provided with a hole permitting passage of the electron beam produced inside the microscope. Either a specimen or a piece of mesh on which a specimen is placed is held inside the hole. An engaging hole is formed at one end of the holding plate. The insertion rod has a pin at its front end. The pin is engaged in the engaging hole to detachably hold the holding plate. Thus, the insertion rod is coupled to the holding plate.

Detachable specimen holder for transmission electron microscope

An electron microscope equipped with a specimen positioning device for moving specimen holders within a place perpendicular to the optical axis of the electron beam between the upper and lower magnetic pole pieces of the objective lens and bringing the holders onto the optical axis. The microscope has a member extending through the side wall of the yoke of the objective lens, a preliminary chamber connected with the side wall of the yoke via a valve, and an exchange mechanism. The member can mount and dismount the specimen holders. The plural holders are placed in position within the chamber. The exchange mechanism can mount and dismount the specimen holder placed at a certain position within the chamber and can move this holder between the magnetic pole pieces of the objective lens from the chamber to the member or vice versa. Once the inside of the lens is evacuated to a high vacuum, a plurality of specimens can be observed successively.

Electron microscope

A tip-scanning mechanism for use in a scanning tunneling microscope uses three drivers for driving a probe tip in three perpendicular directions. The drivers each consist of a piezoelectric element. In accordance with the invention, these three drivers are each shaped into a sheet, and the three sheets are stacked on top of each other. Two of the three drivers produce strains parallel to both faces of the drivers when a voltage is applied across the faces of each driver. Thus, rapid scans can be made without producing distortion.

Scanning device for scanning tunneling microscope

An electron microscope equipped with a scanning tunneling microscope. The electron microscope comprises a holder, a scanning tunneling microscope scanner having a tip, and a shift mechanism. A sample is fixed inside the holder that is mounted between the upper pole piece and the lower pole piece of an objective lens. The shift mechanism moves the scanner in two directions parallel to the surface of the sample and in a direction vertical to the sample surface. The tip is poised above a desired portion of the sample by driving the shift mechanism while observing the tip and either a reflection electron microscope image or a transmission electron microscope image of the sample. Then, the scanner uses the tip to scan the sample surface to obtain a scanning tunneling microscope image.

Electron microscope equipped with scanning tunneling microscope

There is disclosed an electron microscope equipped with two specimen-positioning devices one of which includes a small specimen holder adapted for high-resolution observation. The other includes a large specimen holder adapted for special observation. The holders are interchangeably placed on the optical axis of the electron beam between upper and lower magnetic pole pieces.

An electron microscope having plural stages of focusing lenses between an objective lens and an electron gun. The magnetic pole piece of the focusing lens of the final stage which is on the side of the objective lens takes a conic form which tapers toward the objective lens. The yoke of the objective lens on the side of the focusing lenses is centrally provided with a conic recess. This structure makes it possible to shorten the distance between the position of the magnetic field produced by an auxiliary lens and the front focal point defined by a front objective lens without introducing interference between the focusing lens of the final stage and the object lens proper. Thus, the observation of an electron micrograph covering a wide field of view facilitates accurate analysis of the physical properties of a designated microscopic region on a specimen.

Growing community of inventors

Tokyo, Japan

Kimio Ohi