Taiwan Semiconductor Manufacturing Comp. Ltd.

Kevin Hung

Jui-Chung Peng

Nan-Jung Chen

An-Kuo Yang

Lee-Chung Lu

Chung-Hsing Wang

Wei-Pin Changchien

Chi Wei Hu

Myron O Shak

Wu-An Kuo

Kuo-Yin Chen

Methods for determining a quality of a light source applied to a photolithographic process are provided. An image sensor array is exposed to a light from a light source. Addresses and respective intensities corresponding to a plurality of locations on a pupil map representing intensity of the light from on the image sensor array. At least one of an inner curve and an outer curve of the pupil map is defined based upon the collected addresses and respective intensities. The light source is applied to a photolithographic process if the addresses have a predetermined pattern relative to the at least one of the inner curve and the outer curve.

Methods of determining quality of a light source

A system and method for reducing active power in processors is disclosed. A method embodiment comprises the steps of determining when a particular logic block is inactive, determining the powered state of the particular logic block, isolating the particular logic block from a main processor core, and powering off the particular logic block. When the system needs the particular logic block, the method further comprises reactivating the block. A system embodiment comprises software and a processor coupled to a clock control module, an isolation control module and a header/footer module, operable to isolate a particular logic block and power off a particular logic block, thereby reducing power. Another embodiment comprises a logic module coupled to a clock by a clock gating module, an isolation module for isolating the logic module, a header/footer module for disabling power to the logic module, and a power and clock gating control module for controlling the clock gating module and the header/footer module.

System and method for reducing processor power consumption

Growing community of inventors

Er-Lin Town, Taiwan

Kevin Hung