Tokyo Electron Limited

Kento Ogata

Hiroichi Inada

Koji Takayanagi

Satoshi Shimmura

Kenji Yada

Yuji Sakai

Kenta Shibasaki

Shinichi Seki

A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.

Substrate processing apparatus

Growing community of inventors

Koshi, Japan

Kento Ogata