Kla Instruments Corporation

Kent E Douglas

Scott Allen Young

Curt H Chadwick

Fred E Babian

Roger Kroeze

Nicholas Szabo

A method and apparatus, and variations of each, for inspecting a wafer defining at least one die thereon is disclosed. The present invention first obtains the electronic image equivalent of two die, and then determines the x and y offset between those electronic images. Prior to inspection for defects, those two electronic images are aligned by adjusting the x and y positions of one electronic image of one die with respect to the electronic image of the other die. Once that is accomplished, those electronic images are compared to detect any defects that may exist on one of the die.

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San Martin, CA, United States of America

Kent E Douglas