Average Co-Inventor Count = 8.57
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (4 from 1,405 patents)
4 patents:
1. 9575414 - Illumination system for a microlithographic projection exposure apparatus
2. 9217930 - Illumination system for a microlithographic projection exposure apparatus
3. 9025131 - Optical beam deflecting element, illumination system including same, and related method
4. 8395756 - Illumination system for a microlithographic projection exposure apparatus