Average Co-Inventor Count = 5.57
ph-index = 5
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (12 from 3,768 patents)
12 patents:
1. 11935730 - Systems and methods for cleaning an edge ring pocket
2. 11195706 - Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
3. 10916409 - Active control of radial etch uniformity
4. 10825656 - Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
5. 10615003 - Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
6. 10304662 - Multi regime plasma wafer processing to increase directionality of ions
7. 10283330 - Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
8. 10115568 - Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
9. 10115564 - Uniformity control circuit for use within an impedance matching circuit
10. 10002746 - Multi regime plasma wafer processing to increase directionality of ions
11. 9852889 - Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
12. 9761414 - Uniformity control circuit for use within an impedance matching circuit