Renesas Electronics Corporation

Kenji Kohzu

Yasuhiro Naka

Yoshiyuki Abe

Kazunari Suzuki

Naotaka Tanaka

Chuichi Miyazaki

Toshihide Uematsu

Yasuyuki Nakajima

Kosuke Kitaichi

Shinya Ogane

In a state where an adhesive tape is attached onto a main surface of a semiconductor wafer, a trench is formed in a rear surface of the semiconductor wafer. For forming the trench in the rear surface of the semiconductor wafer, after coating a resist film on the rear surface of the semiconductor wafer, the resist film is patterned by using the photolithography technology. The patterning of the resist film is performed so as not to leave the resist film in the region where the trench is to be formed. Then, the trench is formed in a predetermined region of the semiconductor wafer by the dry etching technology using the patterned resist film as a mask. Specifically, the trench is formed in the region near the dicing line.

Semiconductor device, semiconductor wafer and manufacturing method of the same

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Hitachinaka, Japan

Kenji Kohzu