Keyence Corporation

Kengo Yanase

Shinya Takahashi

Takashi Naruse

Tadashi Hashimoto

A white light interference microscope includes an imaging part taking interference images, a laser light source, a light receiving part receiving reflected light of laser beam from a sample via a confocal optical system and generating a light reception signal corresponding to the light receiving intensity of the reflected light, a focal calculation part calculating a focal position matching a focus of the objective lens with a surface of the sample based on the light reception signal at each height position of the stage or the objective lens, a focus adjustment part adjusting the height position of the stage or the objective lens to match with the focal position, and a first measuring part measuring the surface shape of the sample based on a plurality of interference images taken by the imaging part at a plurality of height positions defined within a height range including the focal position.

White light interference microscope

The image measurement apparatus searches for a workpiece by performing a first stage operation. The image measurement apparatus generates an image in each imaging field-of-view while moving the stage according to a predetermined sequence, and determines whether or not the workpiece is included in each image. When the workpiece is found, the image measurement apparatus switches from the first stage operation to a second stage operation. The image measurement apparatus generates an image in one or more imaging field-of-views located in a direction in which the workpiece extends, among a plurality of imaging field-of-views located around the imaging field-of-view on the stage, in which the image has been obtained. The image measurement apparatus joins a plurality of images generated in the second stage operation to generate a joined image including the whole workpiece, and displays the joined image.

Image measurement apparatus

To provide a high speed photographic device which can display in real time a synchronous image photographed in synchronization with motion of a photographic subject. The high speed photographic device (), which displays in real time a photography image which is in synchronization with a motion cycle of the photographic subject TG, includes: a synchronous cycle adjustment unit () which is for designating a synchronous cycle Tsync; a camera () which photographs the photographic subject TG at a photography cycle Tshot that is 1/N as long as the synchronous cycle Tsync; and a display unit () which displays in real time the photographic subject TG by displaying the photography image of every synchronous cycle Tsync every display cycle Tdisp. The synchronous cycle adjustment unit () can adjust the synchronous cycle Tsync at a step width &#x394;Tsync smaller than a visual minimum cycle, within an adjustment range which does not include less than the visual minimum cycle.

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Osaka, Japan

Kengo Yanase