Shanghai Huahong Grace Semiconductor Manufacturing Corporation

Kegang Zhang

Ning Wang

Hualun Chen

An embedded SONOS memory and a method for making the same. The method includes: forming a connecting layer on one side of a selection transistor polysilicon gate; forming a second silicon oxide layer and an ONO charge storage layer on the other side of the selection transistor polysilicon gate far away from the connecting layer; then forming a memory transistor polysilicon gate on the side of the second silicon oxide layer far away from the connecting layer, so as to obtain the selection transistor polysilicon gate and the memory transistor polysilicon gate in a back-to-back structure.

Embedded SONOS memory and method of making the same

A memory array that includes a plurality of storage cells, a plurality of bit lines, a plurality of memory transistor word lines and a plurality of selection transistor word lines, wherein the storage cells form an array of M rows*N columns; each storage cell includes a selection transistor and a memory transistor connected in series; a source and a gate of each selection transistor are connected, and the gates of the selection transistors in the same row are connected to a corresponding selection transistor word line.

Memory array

A SONOS nonvolatile memory includes a second gate structure of a selectron isolated from a first gate structure of a memotron by an inter-gate dielectric isolation layer formed on a first side of the first gate structure through self-alignment. The second gate structure is formed on a first side of the inter-gate dielectric isolation layer through self-alignment. A cell structure is formed by two adjacent cell structures. A first window defines an area formed by the two first gate structures. Two sides of each first gate structure are defined through self-alignment by first top silicon nitride layers formed on inner sides of the first window. First silicon nitride spacers are formed on second sides of the first gate structures through self-alignment. The bottom area of a contact hole between the second sides of the first gate structures is defined through self-alignment by the two first silicon nitride spacers.

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Shanghai, China

Kegang Zhang