Applied Materials, Inc.

Ke Chang

Ananthkrishna Jupudi

Yueh Sheng Ow

Glen T Mori

Arkajit Roy Barman

Aksel Kitowski

Loke Yuen Wong

Vibhu Jindal

Huixiong Dai

Hao Chen

Christopher S Ngai

Wenhui Wang

Keith Tatseun Wong

Shuwei Liu

Liqi Wu

Yongmei Chen

Wenyu Zhang

Sai Abhinand

Hui Ni Grace Fong

Extreme ultraviolet (EUV) mask blanks, methods for their manufacture, and production systems therefor are disclosed. The method for forming an EUV mask blank comprises placing a substrate in a multi-cathode physical vapor deposition chamber, the chamber comprising at least three targets, a first molybdenum target adjacent a first side of a silicon target and a second molybdenum target adjacent a second side of the silicon target.

Extreme ultraviolet mask blank defect reduction

Implementations of the present disclosure generally relate to the fabrication of integrated circuits, and more particularly, to methods for forming a layer. The layer may be a mask used in lithography process to pattern and form a trench. The mask is formed over a substrate having at least two distinct materials by a selective deposition process. The edges of the mask are disposed on an intermediate layer formed on at least one of the two distinct materials. The method includes removing the intermediate layer to form a gap between edges of the mask and the substrate and filling the gap with a different material than the mask or with the same material as the mask. By filling the gap with the same or different material as the mask, electrical paths are improved.

Method for forming a layer

Methods and apparatus for processing a substrate are described herein. A vacuum multi-chamber deposition tool can include a degas chamber with both a heating mechanism and a variable frequency microwave source. The methods described herein use variable frequency microwave radiation to increased quality and speed of the degas process without damaging the various components.

Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications

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Singapore, Singapore

Ke Chang