Toyoda Gosei Co., Ltd.

Kazuya Hasegawa

Tohru Oka

Nariaki Tanaka

Toru Oka

Noriaki Murakami

Yukihisa Ueno

Takahiro Sonoyama

Kota Yasunishi

The likelihood of formation of a corner resulting from a recess in a part of an n-type semiconductor layer is reduced at a deeper position than a p-type semiconductor layer. A method of manufacturing a semiconductor device comprises: forming a gallium nitride (GaN) based n-type semiconductor layer containing n-type impurities; forming a groove by forming a first mask on a part of a surface of the n-type semiconductor layer and then etching a part uncovered by the first mask; removing the first mask; forming a gallium nitride (GaN) based p-type semiconductor layer containing p-type impurities on the surface of the n-type semiconductor layer including the groove; etching the p-type semiconductor layer so as to expose the n-type semiconductor layer at least in a range differing from a range in the presence of the groove; and forming a metal electrode contacting the exposed n-type semiconductor layer and the p-type semiconductor layer.

Method of manufacturing semiconductor device

A Schottky barrier diode comprises a semiconductor layer configured to include a surface and a plurality of recesses that are recessed relative to the surface; and a Schottky electrode arranged to form a Schottky contact with the surface. When the semiconductor layer is viewed from a surface side thereof, the surface is arranged continuously, and distances on the surface between adjacent recesses are substantially identical. This configuration suppresses a photoresist from being left in any unintended portion.

Schottky barrier diode

A semiconductor device includes a substrate, a semiconductor layer that is formed on the substrate and includes a pn junction or a hetero-junction, an insulating film that is formed on the semiconductor layer to be in contact with an end of the pn junction or an end of the hetero-junction, and an electrode formed on the semiconductor layer. The insulating film includes an insulating layer that is mainly made of negatively charged microcrystal.

Semiconductor device including insulating film that includes negatively charged microcrystal

There is provided a semiconductor device configured to include a plurality of semiconductor units formed in a semiconductor layer. Each of the semiconductor units comprises a mesa portion; a Schottky electrode formed on the mesa portion; an insulating film formed continuously on another portion of the Schottky electrode that is nearer to an edge of an upper face of the mesa portion than one portion of the Schottky electrode, on a side face of the mesa portion, and on a surface of the semiconductor layer other than the mesa portion; and a wiring electrode formed on the Schottky electrode and the insulating film. An angle between the side face of the mesa portion and the surface of the semiconductor layer is 90 degrees. A part of the wiring electrode is placed between the insulating films formed on opposed side faces of adjacent mesa portions. The insulating films formed on the opposed side faces are interconnected on the surface of the semiconductor layer, such as to separate the part of the wiring electrode from the semiconductor layer.

Semiconductor device and manufacturing method of the same

A technique of suppressing leak current in a semiconductor device is provided. A semiconductor device, comprises: a semiconductor layer made of a semiconductor; an insulating layer configured to have electric insulation property and formed to cover part of the semiconductor layer; a first electrode layer formed on the semiconductor layer, configured to have a work function of not less than 0.5 eV relative to electron affinity of the semiconductor layer and extended to surface of the insulating layer to form a field plate structure; and a second electrode layer configured to have electrical conductivity and formed to cover at least part of the first electrode layer. A distance between an edge of a part of the first electrode layer that is in contact with the semiconductor layer and the second electrode layer is equal to or greater than 0.2 &#x3bc;m.

Semiconductor device and manufacturing method thereof

A semiconductor device comprises: a semiconductor layer; and an insulating film that is formed on the semiconductor layer. The insulating film includes an insulating layer that is mainly made of negatively charged microcrystal.

Semiconductor device including an insulating layer which includes negatively charged microcrystal

A semiconductor device comprises a semiconductor layer including a mesa structure and a peripheral surface extending around the mesa structure, the mesa structure having a plateau shape with an upper surface and a side surface; a Schottky electrode forming a Schottky junction with the upper surface; an insulating film extending from the peripheral surface, across the side surface, and onto the Schottky electrode, the insulating film having an opening formed on the Schottky electrode; and a wiring electrode electrically connected to the Schottky electrode inside the opening, the wiring electrode extending from inside of the opening, across a portion of the insulating film formed on the side surface, and onto another portion of the insulating film formed on the peripheral surface.

Semiconductor device and method of manufacturing the same

A semiconductor device includes; a semiconductor layer mainly made of GaN; a protective film provided to have electrical insulation property and configured to coat the semiconductor layer; and an electrode provided to have electrical conductivity and configured to form a Schottky junction with the semiconductor layer. The protective film includes: a first layer made of AlOand arranged adjacent to the semiconductor layer; a second layer made of an electrical insulation material different from AlOand formed on the first layer; and an opening structure formed to pass through the first layer and the second layer. The electrode is located inside of the opening structure.

Semiconductor device

A semiconductor device includes: a p-type semiconductor layer mainly made of GaN; an n-type semiconductor layer mainly made of GaN and joined with the p-type semiconductor layer; a protective film arranged to coat the p-type semiconductor layer and the n-type semiconductor layer; a gate insulating film arranged to coat the p-type semiconductor layer and the n-type semiconductor layer; and a gate electrode joined with the gate insulating film. The protective film includes: a first layer made of AlOand arranged adjacent to the p-type semiconductor layer and the n-type semiconductor layer to coat an edge of a p-n junction surface; a second layer made of an electrical insulation material different from AlOand formed on the first layer; and an opening structure formed to pass through the first layer and the second layer. The gate insulating film is placed inside of the opening structure.

Growing community of inventors

Kiyosu, Japan

Kazuya Hasegawa