Shin-etsu Chemical Co., Ltd.

Shin-etsu Bio., Inc.

Kazumasa Maruyama

Toshinobu Ishihara

Katsuya Takemura

Satoshi Watanabe

Yoshihumi Takeda

Youichi Ohsawa

Hiroaki Muto

Yoshiro Onda

Junji Shimada

Shigehiro Nagura

Fujio Yagihashi

Tohru Chiba

Taira Homma

Ken'ichi Itoh

Kazuyuki Yamamoto

Minoru Takamizawa

Hirofumi Kishita

Tatsushi Kaneko

Kouichi Yamaguchi

Kanji Murofushi

Minoru Shigemitsu

Hiroshi Suzuki

Atsushi Hatayama

Sigehiro Nagura

A resist composition comprising an alkali-soluble resin, typically a partially t-butoxycarbonylated polyhydroxystyrene, a p-butoxystyrene/t-butylacrylate copolymer or p-butoxystyrene/maleic anhydride copolymer as a dissolution inhibitor, and a iodonium or sulfonium salt as a photoacid generator is effective for forming a resist film which can be precisely and finely patterned using high energy radiation such as a KrF excimer laser.

Resist composition with polymeric dissolution inhibitor and alkali

A method of forming a resist pattern comprising forming a photoresist layer on a substrate, forming a transparent anti-reflective film on said photoresist layer by applying an anti-reflective material onto said photoresist layer, said anti-reflective material comprising a fluorinated resin which is soluble in an organic hydrocarbon solvent, exposing a light to said resist layer through said transparent anti-reflective film, removing said anti-reflective film using an organic hydrocarbon solvent, and developing said photoresist layer.

Method of forming resist pattern utilizing fluorinated resin

Trifluoromethanesulfonic and p-toluenesulfonic acid bis- or tris(p-tert-butoxyphenyl)sulfonium salts are novel. They are prepared from bis(p-tert-butoxyphenyl)sulfoxide which is also novel. A chemically amplified positive resist composition which contains the sulfonium salt as a photo-acid generator is highly sensitive to deep-UV rays, electron beams and X-rays, can be developed with alkaline aqueous solution to form a pattern, and is thus suitable for use in a fine patterning technique.

Sulfonium salt and chemically amplified positive resist composition

Tristertbutoxyphenyl sulfonium tosylate compound

A method for continuously precipitating a polysaccharide dissolved in an aqueous solution wherein a non-solvent for the polysaccharide is admixed with the aqueous solution to cause the polysaccharide to precipitate from the solution. The method includes the step of simultaneously feeding the aqueous solution containing the dissolved polysaccharide and the non-solvent through respective constant flow rate-pumps to produce non-pulsating metered first and second streams which are unaffected by pressure changes in the aqueous solution or the non-solvent fed to the respective pumps. The metered streams are simultaneously introduced from the respective pumps into a rotary turbine to mix the solution and the non-solvent and precipitate the polysaccharide. The precipitated polysaccharide is cut with an interlocking cutter which comprises a fixed cutter and a rotary cutter, and a suspension of finely cut polysaccharide particles is continuously withdrawn.

Method for purifying polysaccharides

A novel sulfonium salt having at least one substituted aromatic group having acid labile groups and at least one nitrogenous aromatic group is provided. A chemically amplified, positive resist composition comprising the sulfonium salt as well as an alkali soluble resin and a dissolution inhibitor in an organic solvent has solved the PED problem.

Sulfonium salt and resist composition

A modified xanthan gum has a viscosity of not less than 800 cP as determined on a 0.5% by weight solution thereof in a 12% by weight aqueous sodium chloride solution at 20.degree. C. and a ratio of this viscosity to that determined on a 0.5% by weight solution thereof in distilled water of not less than 1.5. The modified xanthan gum can be prepared by a method comprising the steps of mixing an organic solvent which does not dissolve xanthan gum and is hydrophilic with an aqueous solution of xanthan gum in a mixer, cutting, into fine fibrous materials, deposites formed in the mixed solution together with the mixed solution with a cutter, separating and recovering the suspended fine fibrous materials from the mixed solution and then drying the materials at a temperature of not more than 80.degree. C. The modified xanthan gum can directly be dissolved in aqueous solutions of salts such as common salt even at room temperature and can thus easily show a desired effect of thickening the aqueous salt solutions.

Modified xanthan gum and method for modifying xanthan gum

A resist composition comprising a base resin, an acid release agent, and a dissolution inhibitor is improved in sensitivity and resolution when the base resin is typically selected from poly-t-butoxystyrene/poly-hydroxystyrene, poly-t-butoxystyrene/poly-p-methoxymethoxystyrene/polyhydroxystyrene, and poly-t-butoxystyrene/poly-p-methoxystyrene/polyhydroxystyrene copolymers. The composition forms a resist useful for the manufacture of LSI.

Resist compositions

A method for continuously purifying a polysaccharide comprises the steps of continuously and simultaneously feeding an aqueous solution of a polysaccharide and a hydrophilic organic solvent which does not solubilize the polysaccharide, mixing these two kinds of liquids with a rotary turbine to precipitate the polysaccharide, cutting the precipitated polysaccharide with an interlocking cutter which comprises a fixed cutter and a rotary cutter, and continuously withdrawing a suspension of finely cut polysaccharide particles. The resulting polysaccharide is not in the form of strings, but in the form of fine particles and thus it is never adhered to an apparatus for purification and does not cause any retention within the apparatus. The particulate polysaccharides obtained by the method are easily separated from the resulting suspension and dehydrated.

An electroluminescent device of the dispersion type exhibiting high brightness of electroluminescence and having excellent heat resistance and flexibility, and usable as a backlighting unit for liquid crystal displays and as a plane light-emitting body, can be prepared by using, as the matrix material of the particulate electroluminescent material, a specific cyanoalkyl group-containing organopolysiloxane represented by the average unit formula R.sup.1.sub.a R.sup.2.sub.b SiO.sub.(4-a-b)/2, in which R.sup.1 is a cyanoalkyl group having 3 to 5 carbon atoms, R.sup.2 is a monovalent hydrocarbon group, a is 0.8 to 1.8 and b is 0 to 1.0 with the proviso that a+b is 1.1 to 1.98.

Electroluminescent composition containing organopolysiloxane and

The dielectric polymeric film in the inventive film capacitor is formed from a cyanoalkyl-containing organopolysiloxane represented by the average unit formula

Film capacitor

A novel aqueous coating composition is proposed for providing enteric coating on solid dosage forms such as tablets. The aqueous coating composition of the invention comprises a fine powder of an enterosoluble cellulose derivative such as hydroxypropylmethylcellulose phthalate and hydroxypropylmethylcellulose acetate succinate, which is insoluble in water but can be plasticized and solubilized with certain plasticizing agents, as dispersed in an aqueous dispersing medium and a plasticizing agent having compatibility with the enterosoluble cellulose derivative and dissolved in the aqueous dispersing medium. The particle size of the enterosoluble cellulose derivative and the boiling point of the plasticizing agent is the key parameters and should be finer than 100 .mu.m in an average particle diameter and not lower than 100.degree. C., respectively. Upon application of the aqueous coating composition to the solid dosage forms, water as the dispersing medium is first evaporated leaving the cellulose derivative and the plasticizing agent, which latter solubilizes the former to form a continuous coating layer on the solid dosage forms imparting good and satisfactory enterosolubility thereto.

Method for providing enteric coating on solid dosage forms and aqueous

The invention provides a novel enterosoluble capsule for containing a medicament, which is shaped with a hitherto not used novel cellulose derivative. The cellulose derivative is a mixed ester of an alkyl-, hydroxyalkyl- or hydroxyalkyl alkylcellulose esterified with succinyl anhydride and an aliphatic monocarboxylic acid anhydride. The enterosoluble capsules have excellent enterosolubility behavior as well as sufficient pliability even without the addition of a plasticizer which is almost indispensable in the prior art materials. The cellulose derivative can be shaped into capsules not only by the conventional dipping method but also by the plastic deformation at an elevated temperature under pressure such as compression molding, vacuum forming, matchedmold forming and the like.

Enterosoluble capsules

A novel cellulose derivative provided in this invention is a mixed ester of an alkoxy or hydroxyalkoxy substituted cellulose ether, prepared by the esterification reaction of the ether with succinic anhydride and an anhydride of an aliphatic monocarboxylic acid. The cellulose derivatives are advantageous because of their capability of producing enteric coatings having sufficient flexibility without the use of a plasticizer as well as by their chemical and physical stability against moisture, and also by easy purification after completion of the esterification reaction. The coatings produced from the derivatives have a similar chemical and physical stability. The cellulose derivatives are useful for the enteric coating of pharmaceutical dosage forms and also for providing halation-preventing layers on photographic films.

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Nakakubiki-gun, Japan

Kazumasa Maruyama