Toray Industries, Inc.

Toray Engineering Company, Limited

Other

Toyota Jidosha Kabushiki Kaisha

Tokyo Institute of Technology

Katsuichi Kitagawa

Takeaki Akatsuka

Hiroyoshi Amo

Hidemitsu Ogawa

Osamu Mita

Kazuyoshi Suzuki

Masashi Sugiyama

Akira Hirabayashi

Yoshitomo Shintani

Kouichi Tamura

Masafumi Otsuki

A film thickness measurement device includes a light source, an imaging component, and a controller. The controller estimates unknown variables I(j), I(j), k(j), and t(i) based on the Formula (1), where i represents an observation point number of an interference image captured by the imaging component, j represents a number for a type of wavelength of monochromatic light, &#x3bb;(j) represents wavelength of the monochromatic light, n represents a refractive index of a semi-transparent film, g(i,j) represents a brightness value observed at an observation point, I(j) represents an intensity of reflected light from a front face of the semi-transparent film, I(j) represents an intensity of reflected light from a rear face of the semi-transparent film when there is no absorption of light in the semi-transparent film, k(j) represents an absorption coefficient of the semi-transparent film, and t(i) represents a film thickness of the semi-transparent film.

Film thickness measurement device using interference of light and film thickness measurement method using interference of light

A method of measuring the density of a plurality of defects that occur in a single crystal for each type of defect, includes: etching an observation surface, which is a surface of the single crystal, to form an etch pits at each defect; calculating the maximum depth, mean depth and depth curvature of each of etch pits formed at a plurality of defects present within a predetermined area on the observation surface; and comparing the measured maximum depth, mean depth and depth curvature with respective reference values to determine the type of each defect within the predetermined area.

Method of measuring defect density of single crystal

A reference plane is arranged in a posture obliquely tilted at an optional angle relative to a traveling direction of a light-beam, so that an interference fringe is generated from the reflected light-beams which are reflected from a target plane and the reference plane and, then, return on a single optical path. An image of the interference fringe is taken by a CCD camera to acquire intensity value data of each pixel. A phase of an interference fringe waveform is obtained for each pixel by a CPU by fitting the intensity value data to a model equation expressing the interference fringe waveform, where the intensity value data contain that of each pixel and those of the pixels in the vicinity of the relevant pixel, on assumption that DC components, AC amplitudes and phases of the interference fringe waveforms are respectively constant in the vicinity of the relevant pixel. The obtained phase is converted into a height to measure a surface profile.

Method for measuring surface profile, and apparatus using the same

A surface profile measuring apparatus for measuring rugged profiles of object surfaces includes a white light source, a varying device for varying a relative distance between an object surface and a reference surface, a frequency band limiting device for limiting the frequency band of white light to a particular frequency band, an image pickup device for picking up an image of the object surface, a sampling device for successively acquiring intensity values of interference light corresponding to varying interference fringes, from a particular location at sampling intervals corresponding to a bandwidth of the particular frequency band, a storage device for storing a group of interference light intensity values acquired, and a computing device for estimating characteristic functions from the group of interference light intensity values stored, and determining a height in the particular location based on a peak position of the characteristic functions.

Surface profile measuring method and apparatus

A method for determining positions of points on a surface of an article including the steps of: detecting apparent positional information of the points from an image of the arrangement of the points; detecting a relative difference between the apparent positional information and predetermined positional information according to design data of the arrangement of the points; and modifying the apparent positional information by the relative difference, which modified information is transmitted to a subsequent system for positioning the point in place. By this, it is possible to inspect a plurality of apertures arranged with a predetermined relationship to each other, such as holes on a nozzle plate of a spinneret, in which apertures are sequentially positioned under a microscope according to positional signals generated based on the positional information obtained.

Method and apparatus for determining position of points on article

An apparatus for adjusting the gap between lips of a die for extruding a plastic sheet material. A pair of flat plates spaced from each other have a plurality of bolts for controlling the gap. The operational adjustment of each bolt is generated as an electric signal, and this electric signal is added with reference to all the bolts to distribute the gaps between the die lips. Each adjustment is changed so that the distribution of the gap between the die lips acquires a predetermined form to thereby determine the necessary amount of adjustment of each bolt.

Apparatus for controlling the gap between lips of a die for extruding a

A method and an apparatus for adjusting the gap between lips of a die for extruding a plastic sheet material. A pair of flat plates spaced from each other have a plurality of bolts for controlling the gap. The operational adjustment of each bolt is generated as an electric signal, and this electric signal is added with reference to all the bolts to distribute the gaps between the die lips. Each adjustment is changed so that the distribution of the gap between the die lips acquires a predetermined form to thereby determine the necessary amount of adjustment of each bolt.

Growing community of inventors

Moriyama, Japan

Katsuichi Kitagawa