Average Co-Inventor Count = 3.64
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm IP Holding B.v. (13 from 1,132 patents)
13 patents:
1. 12173402 - Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
2. 12106965 - Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
3. 11959171 - Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
4. 11952658 - Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
5. 11814715 - Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
6. 11499222 - Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
7. 11492703 - Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
8. 11410851 - Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
9. 11390946 - Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
10. 10741403 - Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
11. 10731249 - Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
12. 10468262 - Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures
13. 10468261 - Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures