Average Co-Inventor Count = 5.09
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mattson Technology, Inc (1 from 278 patents)
2. Steag Rtp Systems Gmbh (1 from 31 patents)
2 patents:
1. 6953338 - Device for thermal treatment of substrates
2. 6449428 - Gas driven rotating susceptor for rapid thermal processing (RTP) system