Texas Instruments Corporation

Kanan Garg

Mahalingam Nandakumar

Haowen Bu

Song Zhao

A method for forming a tensile SiN stress layer for stress memorization enhancement of NMOS transistors with a high Si&#x2014;H/N&#x2014;H bond ratio that does not degrade PMOS transistors. A CMOS integrated circuit is processed through a NMOS source and drain implant but not through NMOS source and drain anneal. A SiN dielectric layer is deposited such that an area ratio of a Si&#x2014;H peak to a N&#x2014;H peak in a FTIR spectrum is greater than 7 and a tensile stress of the SiN dielectric is greater than 150 MPa. The CMOS integrated circuit is annealed after deposition of the SiN dielectric layer and the SiN dielectric layer is removed from at least a part of the integrated circuit.

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Plano, TX, United States of America

Kanan Garg