Unimicron Technology Corporation

Phoenix Precision Technology Corporation

Kan-Jung Chia

Shih-Ping Hsu

Shang-Wei Chen

Shin-Ping Hsu

Chung-Cheng Lien

A method for fabricating a packaging structure having an embedded semiconductor element includes: providing a substrate having opposite first and second surfaces and at least an opening penetrating the first and second surfaces; forming a first metallic frame around the periphery of the opening on the first surface; forming at least an opening inside the first metallic frame by laser ablation; disposing a semiconductor chip in the opening; forming a first dielectric layer on the first and second surfaces and the chip; forming a first wiring layer on the first dielectric layer of the first surface; and forming a first built-up structure on the first dielectric layer and the first wiring layer of the first surface. A shape of the opening is precisely controlled through the first metallic frame around the periphery of the predefined opening region, thereby allowing the chip to be precisely embedded in the substrate.

Method for fabricating packaging structure having embedded semiconductor element

A packaging structure having an embedded semiconductor element includes: a substrate having opposite first and second surfaces and at least an opening penetrating the first and second surfaces; a first metallic frame disposed around the periphery of the opening on the first surface; a semiconductor chip received in the opening and having an active surface formed with a plurality of electrode pads and an opposite inactive surface; two first dielectric layers formed on the active surface and the inactive surface of the chip, respectively; a first wiring layer formed on the first dielectric layer of the first surface; and a first built-up structure disposed on the first dielectric layer and the first wiring layer. A shape of the opening is precisely controlled through the first metallic frame around the periphery of the predefined opening region, thereby allowing the chip to be precisely embedded in the substrate.

Packaging structure having embedded semiconductor element

A packaging substrate with an embedded photosensitive semiconductor chip and a method for fabricating the same are provided. The method includes the steps of: disposing the semiconductor chip in an through cavity of a core board with the photosensitive portion of the semiconductor chip being exposed from the through cavity; forming a first circuit layer on the core board at a side opposite to the photosensitive portion so as to electrically connect the electrode pads of the semiconductor chip; and forming a light-permeable layer on the core board at the same side with the photosensitive portion via an adhesion layer so as to allow light to penetrate through the light-permeable layer and reach the photosensitive portion of the semiconductor chip. When fabricated by the method, the packaging substrate dispenses with conductive wires and a surrounding dam and thus is efficiently downsized.

Package substrate having embedded photosensitive semiconductor chip and fabrication method thereof

A package substrate having a semiconductor component embedded therein and a method of fabricating the same are provided, including: providing a semiconductor chip with electrode pads disposed on an active surface thereof; forming a passivation layer on the active surface and the electrode pads; forming on the passivation layer metal pads corresponding in position to the electrode pads, respectively, so as for the semiconductor chip to be fixed in position to an opening of a substrate body; forming a first dielectric layer on the semiconductor chip and the substrate body; forming dielectric layer openings by laser and preventing the electrode pads from being penetrated by the metal pads; removing the metal pads and the passivation layer in the dielectric layer openings so as to expose the electrode pads therefrom; and forming a first wiring layer on the first dielectric layer for electrical connection with the electrode pads.

Package substrate having semiconductor component embedded therein and fabrication method thereof

A package structure in which a coreless substrate has direct electrical connections to a semiconductor chip and a manufacturing method thereof are disclosed. The method includes the following steps: providing a metal carrier board having a cavity; placing a chip having a plurality of electrode pads on an active surface in the cavity of a board; filling the cavity with an adhesive for fixing the chip; forming a solder mask on the active surface of the chip and the surface of the metal carrier board at the same side, wherein the solder mask has a plurality of openings to expose the electrode pads of the chip; forming a built-up structure on the solder mask and the exposed active surface of the chip in the openings; and removing the metal carrier board. In this method the metal carrier board can support the built-up structure to thereby avoid warpage.

Package structure in which coreless substrate has direct electrical connections to semiconductor chip and manufacturing method thereof

A package substrate embedded with a semiconductor component includes a substrate, a semiconductor chip, a first dielectric layer, a first circuit layer and first conductive vias. The substrate is formed with an opening for allowing the semiconductor chip to be secured therein. The semiconductor chip has an active surface and an inactive surface, wherein a plurality of electrode pads are formed on the active surface thereof and a passivation layer disposed thereon. The first dielectric layer is disposed both on the substrate and the passivation layer, wherein vias are formed at locations corresponding to those of the electrode pads and penetrating the dielectric layer and the passivation layer to expose the electrode pads therefrom. The first circuit layer is disposed on the first dielectric layer and electrically connected to the first conductive vias. The first conductive vias are disposed in the openings of the dielectric and passivation layers and the first circuit layer is electrically connected to the electrode pads, thereby allowing the first conductive vias to be electrically connected to the electrode pads of the chip.

Package substrate embedded with semiconductor component

A packaging substrate structure with a semiconductor chip embedded therein is disclosed, including a carrier board having a first and an opposed second surfaces and disposed with at least a through cavity; a semiconductor chip received in the through cavity, the chip having an active surface and an inactive surface opposite to one another, wherein the active surface has a plurality of electrode pads, a passivation layer is disposed on the active surface with the electrode pads exposed from the passivation layer, and metal pads are disposed on surfaces of the electrode pads; a buffer layer disposed on the first surface of the carrier board and on surfaces of the passivation layer and the metal pads; a first dielectric layer disposed on the buffer layer; and a first circuit layer disposed on the first dielectric layer and electrically connected with the metal pads of the chip via first conductive structures disposed in the buffer layer and the first dielectric layer, wherein the CTE (Coefficient of Thermal Expansion) of the buffer layer is between the CTE of the semiconductor chip and the CTE of the dielectric layer. Thereby, the buffer layer can reduce the stress on the interface between the dielectric layer and the semiconductor chip.

Packaging substrate structure with a semiconductor chip embedded therein

A packaging substrate having a semiconductor chip embedded and a fabrication method thereof are provided. The method includes forming a semiconductor chip in a through cavity of a core board and exposing a photosensitive portion of the semiconductor chip from the through cavity; sequentially forming a first dielectric layer and a first circuit layer on the core board, the first circuit layer being electrically connected to the electrode pads of the semiconductor chip; forming a light-permeable window on the first dielectric layer to expose the photosensitive portion of the semiconductor chip and adhering a light-permeable layer onto the light-permeable window, thereby permitting light to penetrate through the light-permeable layer to reach the photosensitive portion. Therefore, when fabricated with the method, the packaging substrate dispenses with conductive wires and dams and thus can be downsized.

Package substrate having embedded semiconductor chip and fabrication method thereof

The present invention provides a circuit board having electronic components integrated therein, including a carrier board having an metallic oxide layer formed on each two surfaces of a metal layer, and having at least one through cavity; at least a semiconductor chip hold in the opening; at least a capacitor disposed on one surface of the carrier board, wherein the surface with the capacitor disposed thereon is at the same side with the active surface of the semiconductor chip. The capacitor is constituted of a first electrode plate disposed on partial surface of one side of the carrier board, a high dielectric material layer disposed on the surface of the first electrode plate, and a second electrode plate, paralleling and corresponding to the first electrode plate, disposed on the surface of the high dielectric material. The metal layer and the oxidation layer of the carrier board can enhance rigidity as well as tenacity and also integrate semiconductor chips and capacitors in the circuit board structure.

Circuit board structure having electronic components integrated therein

Provided is a stacked semiconductor device including a first flexible layer and a second flexible layer combined together, serving as a flexible substrate body being bent somewhere such that a surface of the first flexible layer itself is face-to-face clipped, two semiconductor chips each embedded in the flexible substrate body, and an adhesive layer sandwiched in a gap between the face-to-face surface of the first flexible layer. The active surface of each of the semiconductor chips has plurality of electrode pads thereon electrically connected to a first circuit layer on the second flexible layer. The semiconductor chips are stacked up and embedded in the flexible substrate body, thereby reducing package height to achieve miniaturization of electronic products. A method for fabricating the stacked semiconductor device is also provided.

Stacked semiconductor device and fabricating method thereof

Carrier structure embedded with semiconductor chips and method for manufacturing the same are disclosed. The carrier structure comprises a metal plate and pluralities of semiconductor chips. An adhesive material is disposed on both surfaces of the metal plate, and pluralities of cavities are formed through the metal plate. The semiconductor chips are embedded in the cavities and mounted in the metal plate. The semiconductor chips each have an active surface on which pluralities of electrode pads are disposed. A built-up structure is formed on the surface of the carrier structure and the active surfaces of the semiconductor chips, which has pluralities of conductive vias therein to conduct the semiconductor chips, and has pads thereon. Besides, the metal plate has an etching cavity between the semiconductor chips, and the etching cavity is filled with the adhesive material. The present invention solves the problem of metal burrs being formed when cutting.

Carrier structure embedded with semiconductor chips and method for manufacturing the same

A carrier structure embedded with semiconductor chips is disclosed, which comprises a core board and a plurality of semiconductor chips mounted therein. The core board comprises two metal plates between which an adhesive material is disposed. An etching stop layer is deposited on the both surfaces of the core board. Pluralities of cavities are formed to penetrate through the core board. The semiconductor chips each have an active surface on which a plurality of electrode pads are disposed, and those are embedded in the cavities and mounted in the core board. An etching groove formed on the core board between the neighboring semiconductor chips is filled with the adhesive material. The present invention avoids the production of metal burrs when the carrier structure is cut.

Carrier structure embedded with semiconductor chip

A package structure having a semiconductor chip embedded therein and a method of fabricating the same are disclosed. The package structure comprises: an aluminum oxide composite plate and a semiconductor chip. The aluminum oxide composite plate is formed by a stack consisting of an adhesive layer placed in between two aluminum oxide layers. The semiconductor chip having an active surface a plurality of electrode pads disposed thereon can be embedded and secured in the aluminum oxide composite plate. The present invention also comprises a method of fabricating the above-mentioned package structure. The present invention provides an excellent package structure, which can decrease the thickness of the package structure and make the package structure having characteristics of high rigidity and enduring tenacity at the same time.

Package structure having semiconductor chip embedded therein and method for fabricating the same

A circuit board structure with embedded electronic components includes: a carrier board having an adhesive layer with two surfaces formed with first and second metal oxide layers covered by first and second metal layers and having at least one through hole; at least one semiconductor chip received in the through hole of the carrier board; an adhesive material filling a gap between the through hole and the semiconductor chip so as to secure the semiconductor chip in position to the through hole; a high dielectric material layer formed outwardly on the second metal layer; and at least one electrode board formed outwardly on the high dielectric material layer such that a capacitance component is formed with the second metal layer, high dielectric material layer, and electrode board. Accordingly, the capacitance component is integrated into the circuit board structure.

Circuit board structure with embedded electronic components

A plate structure having a chip embedded therein, comprises an aluminum plate having at least one aluminum oxide layer formed on its surface, and a cavity therein; a chip embedded in the cavity, wherein the chip has an active surface; at least one electrode pad mounted on the active surface; and a build-up structure mounted on the surface of the aluminum plate, the active surface of the chip, and the surface of the electrode pad, wherein the build-up structure comprises at least one conducting to electrically connect to the electrode pad. Besides, a method of manufacturing a plate structure having a chip embedded therein is disclosed. Therefore, the plate structure having a chip embedded therein can be processed by a simple method to achieve the tenacity of aluminum and the rigidity of aluminum oxide.

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Hsin-Chu, Taiwan

Kan-Jung Chia