Kla Corporation

Kaiwen Xu

John Josef Hench

Thaddeus Gerard Dziura

Andrei Veldman

Antonio Arion Gellineau

Houssam Chouaib

Yin Xu

Liequan Lee

Aaron J Rosenberg

Jonathan Iloreta

Abhi Gunde

A semiconductor metrology tool inspects an area of a semiconductor wafer. The inspected area includes a plurality of instances of a 3D semiconductor structure arranged periodically in at least one dimension. A computer system generates a model of a respective instance of the 3D semiconductor structure based on measurements collected during the inspection. The computer system renders an augmented-reality or virtual-reality (AR/VR) image of the model that shows a 3D shape of the model and provides the AR/VR image to an AR/VR viewing device for display.

Visualization of three-dimensional semiconductor structures

A semiconductor metrology tool inspects an area of a semiconductor wafer. The inspected area includes a plurality of instances of a 3D semiconductor structure arranged periodically in at least one dimension. A computer system generates a model of a respective instance of the 3D semiconductor structure based on measurements collected during the inspection. The computer system renders an image of the model that shows a 3D shape of the model and provides the image to a device for display.

Growing community of inventors

Shanghai, China

Kaiwen Xu