Siemens Aktiengesellschaft

Infineon Technologies Ag

Jürgen Elger

Christiane Gast

Thomas Trenner

Michael Dallmann

Markus Remmel

A method for monitoring a process and/or production plant, which includes a plurality of components and which is planned using a plurality of engineering systems, includes a step of providing first result data pertaining to at least one portion of the plurality of components using a first of the plurality of engineering systems, and second result data pertaining to at least one portion of the plurality of components using a second of the plurality of engineering systems. The method also includes a step of extracting topology data, which describe an arrangement of the plurality of components within the process and/or automation plant, and operating data for the plurality of components from the first and second result data. The method further includes creating a model for the process and/or production plant by using the topology data and the operating data. Also disclosed is an apparatus for carrying out the method.

Method for monitoring a process and/or production plant

An installation for processing wafers with a plurality of fabrication units and a plurality of measurement units as well as a transport system for transporting the wafers, is described. A transport control unit, which detects a capacity utilization of the installation and saves a processing sequence of the wafers, is allocated to the transport system. As a function of these parameters, control instructions are generated in the transport control unit, and can be output to the transport system for controlling the wafer transport procedure.

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Pyrbaum, Germany

Jürgen Elger