Changxin Memory Technologies, Inc.

Jun Wei

Wei Li

Dong Yan

Zijie Wang

Embodiments provide a semiconductor structure and a method for fabricating the same. The method includes: providing a substrate; forming, in the substrate, active pillars spaced and isolation layers configured to isolate the active pillars; forming, in an active pillars and an isolation layers, word line trenches extending along a first direction; and forming a first word line in the first word line trench and a second word line in the second word line trench, where opposite surfaces of the first word line form a first gate channel together with the active pillar, opposite surfaces of the second word line form a second gate channel together with the active pillar, and sum of a width of the first gate channel along the first direction and a width of the second gate channel along the first direction is greater than a perimeter of the active pillar.

Growing community of inventors

Hefei, China

Jun Wei