Shin-etsu Chemical Co., Ltd.

Jun Horikoshi

Tsuneo Kimura

Yu Yanase

Toshiaki Watanabe

Hironao Fujiki

Toshihiko Ryuo

Masayuki Tanno

Norio Kameda

Provided are an adhesive comprising substantially no surface modifier and leaving a less residue behind after a pellicle is separated; a pellicle; and a method of selecting an adhesive leaving a less residue behind. More specifically, provided are an adhesive for a pellicle having a ratio of a peel strength to a tensile strength of from 0.10 to 0.33; a pellicle comprising a pellicle frame, a pellicle film provided over an upper end face of the pellicle frame, and the adhesive adhered to a lower end face of the pellicle frame; and a method of selecting an adhesive, comprising the steps of: measuring a peel strength and a tensile strength of an adhesive, and selecting an adhesive having a ratio of the former to the latter of from 0.10 to 0.33 as the adhesive for a pellicle.

Adhesive for pellicle, pellicle, and method of selecting adhesive for pellicle

A pellicle is proposed in which an adhesive layer is formed of an adhesive which undergoes a hardness change at a rate from &#x2212;50% through +50% of its initial hardness, measured after curing, when it is let to sit in atmosphere of a temperature of 300 degrees C. for 7 days on end; the rate of hardness change being defined by a following equation:Rate of hardness change (%)={(hardness after the sitting)&#x2212;(initial hardness before the sitting)}&#xf7;initial hardness before the sitting)&#xd7;100.

Adhesive suitable for a pellicle for EUV lithography and a pellicle using the same adhesive

A pellicle is proposed in which an adhesive layer which adheres a pellicle film to a pellicle frame is mixed (filled) with powder of thermally conductive material such as metallic compound so that the heat generated by the strong EUV ray is quickly passed to the pellicle frame from the pellicle film lest the latter is deformed by the heat.

Pellicle for EUV

A pellicle is proposed in which the agglutinant layer which enables the pellicle to adhere to a photomask is doped with a de-foaming agent which depends on a reactive fluorine-modified silicone oil for its anti-foaming performance, and typically such reactive fluorine-modified silicone oil has a vinyl group at both ends of its molecular chain.

Agglutinant for pellicle and a pellicle using it

The present invention is directed to a pellicle frame of a pellicle for use in photolithography, comprising: a coating of a layer containing a para-xylylene-based polymer. The invention can inhibit release of sulfate ions, ammonium ions and so on from the pellicle frame and thereby reduce the occurrence of haze under exposure environment.

Pellicle frame and pellicle

A pellicle is proposed in which the agglutinant layer which enable the pellicle to be adhered to a photomask is doped with a mechanoluminescent material so that the uniformness of the thickness of the agglutinant layer can be confirmed, when the pellicle is adhered to the photomask, by observing visually or by CCD camera for any irregularity in the pattern of the light emitted from the agglutinant layer.

Agglutinat for pellicle, a pellicle using it and a method for evaluating pellicle

There is provided a pellicle having a frame, a membrane and an agglutinant layer (adhesive to bond the pellicle on a photo mask) in which the release liner (detachable sheet) laid to the agglutinant layer for protection thereof is controlled to have a surface roughness of 5-30 micrometers on the side of the liner which is attached to the agglutinant layer, with a result that the releasability of the liner is improved suitably.

Pellicle

There is provided a pelliclefor lithography having a frame, a filmand an agglutinant layer(an adhesive to bond the pellicle on a photomask), in which the agglutinant layeris doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layerand the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.

Agglutinant for pellicle and a pellicle including the same

There is provided a pellicle having a frame, a filmand an adhesivefor bonding the filmto the frame, and this adhesiveis a silicone compound having a low outgassing tendency and high heat resistance; in a better mode case, it can maintain its adhesive strength at temperatures 100-200 degrees C. and it exhibits results of TML being 1.0% or lower and CVCM being 0.1% or lower when tested in accordance with ASTM E595-93; thus this pellicle is useful for EUV light exposure lithography.

Pellicle for lithography

There is provided a pellicle having a pellicle frame on which an adhesive layer for attaching the pellicle onto a photo mask is made from a room temperature curable two-part adhesive, so that a formation of the adhesive layer is carried out without heating. The room temperature curable two-part adhesive dispensed on the pellicle frame is not heated for curing.

Pellicle and a method for making the same

Provided is a room temperature-curable, heat-conductive silicone rubber composition, including: (A) a diorganopolysiloxane with both molecular chain terminals blocked with hydroxyl groups and/or organooxy groups, (B) a heat-conductive filler other than a palladium powder, (C) an organosilane containing two or more hydrolyzable groups, and/or a partial hydrolysis-condensation product thereof, and (D) a palladium powder. The composition improves on the drawbacks of the conventional technology, is able to suppress the quantity of hydrogen gas produced from the heat-conductive filler, exhibits superior storage properties, and yields a low-hardness cured product upon curing. The cured product is useful as a heat-conductive material for a heat-generating electronic component.

Room temperature-curable, heat-conductive silicone rubber composition

RTV silicone rubber compositions are provided comprising (A) an organopolysiloxane, (B) an organosilicon compound or partial hydrolytic condensate thereof, and (C) a non-aromatic amino-bearing compound. The compositions, when electric and electronic parts having a copper, silver or other metal portion on their surface are encapsulated or sealed therewith, can prevent or retard the parts from corrosion with sulfur-containing gas.

RTV silicone rubber composition for electric and electronic part protection, circuit boards, silver electrodes, and silver chip resistors

An organopolysiloxane composition which contains from 0.01% to less than 0.5% by weight of a sulfidable metal powder is provided. When a silver-containing precision electronic part is encapsulated or sealed with the cured composition, the metal powder in the cured composition is sulfided with sulfur-containing gas, thereby preventing or retarding the corrosion of the encapsulated or sealed electronic part with the sulfur-containing gas.

Organopolysiloxane composition and electronic part encapsulated therewith

An inorganic filler which has been surface coated with an addition cure silicone composition in the cured state is included in an organopolysiloxane composition, which becomes effective for preventing the filler from settling down even during long-term shelf storage.

Organopolysiloxane compositions

A room temperature curable organopolysiloxane composition comprising (a) an organopolysiloxane having a specific structure, (b) a alkenoxysilane or substituted alkenoxysilane or a partial hydrolyzate thereof, and (c) a siloxane or a partial hydrolyzate thereof cures into a product which experiences no decline of insulation resistance upon application of voltage in a hot humid environment and is resistant to electrolytic corrosion.

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Annaka, Japan

Jun Horikoshi