Samsung Electronics Co., Ltd.

Lg Semicon Co., Ltd.

Goldstar Electron Co., Ltd.

Jun-Hee Lim

Yong-Seok Kim

Kohji Kanamori

Kyung-Hwan Lee

Tae-young Kim

Sung-Il Chang

Su-Jin Ahn

Jae-Sung Sim

Ki-Jae Hur

Ji-Yeong Hwang

Satoru Yamada

Dong-jin Lee

Chang-seok Kang

Sung-Ho Jang

Hyuck-Chai Jung

Won-Kyung Park

Bong-Soo Kim

Sung-Hwan Kim

Joon Soo Han

Jun-hyung Kim

Hyeong-sun Hong

Se-Young Kim

Soo-jin Hong

Kyung-Eun Kim

Doo-young Kim

Jun-ho Park

Sang-Pyo Hong

Mun-Mo Jeong

Seung-Uk Han

Choong-sun Shin

Chan-Young Kim

Hae-in Jung

Yoon-Jong Huh

Chan-Seung Hwang

Sung-Duk Hong

Ki-Jae Huh

In a method of manufacturing a vertical semiconductor device, an insulation layer and a sacrificial layer are alternatively and repeatedly formed on a substrate to define a structure. The structure is etched to form a hole therethrough that exposes the substrate. A first semiconductor pattern is formed in a lower portion of the hole, and a blocking pattern, a charge storage pattern, a tunnel insulation pattern and a first channel pattern are formed on a sidewall of the hole. A second channel pattern is formed on the first channel pattern and the semiconductor pattern, and a second semiconductor pattern is formed on a portion of the second channel pattern on the semiconductor pattern to define an upper channel pattern including the second channel pattern and the second semiconductor pattern. The sacrificial layers are replaced with a plurality of gates, respectively, including a conductive material.

Vertical semiconductor devices and methods of manufacturing the same

A vertical memory device includes gate electrodes on a substrate and a first structure. The gate electrodes may be spaced apart from each other in a first direction perpendicular to an upper surface of the substrate. The first structure extends through the gate electrodes in the first direction, and includes a channel and a variable resistance structure sequentially stacked in a horizontal direction parallel to the upper surface of the substrate. The variable resistance structure may include quantum dots (QDs) therein.

Vertical memory devices

A vertical semiconductor device includes conductive pattern structures extending in a first direction, a trench between two adjacent conductive pattern structures in a second direction crossing the first direction, a memory layer disposed on sidewalls of the trench, first insulation layers disposed in the trench and spaced apart from each other in the first direction, channel patterns disposed on the memory layer and in the trench and spaced apart from each other in the first direction, and etch stop layer patterns disposed in the trench. Each conductive pattern structure includes conductive patterns and insulation layers alternately stacked on an upper surface of the substrate. Each etch stop layer pattern is disposed between a corresponding first insulation layer and the blocking dielectric layer. Etch stop layer patterns are spaced apart from each other in the first direction.

Vertical semiconductor devices

A vertical semiconductor device includes a conductive pattern structure in which insulation patterns and conductive patterns alternately and repeatedly stacked on the substrate. The conductive pattern structure includes an edge portion having a stair-stepped shape. Each of the conductive patterns includes a pad region corresponding to an upper surface of a stair in the edge portion. A pad conductive pattern is disposed to contact a portion of an upper surface of the pad region. A mask pattern is disposed on an upper surface of the pad conductive pattern. A contact plug penetrates the mask pattern to contact the pad conductive pattern.

Vertical semiconductor devices and method of manufacturing the same

A vertical semiconductor device includes a conductive pattern structure, a memory layer, a pillar structure, and second and third insulation patterns. The conductive pattern structure includes conductive patterns and insulation layers, and may include a first portion extending in a first direction and a second portion protruding from a sidewall of the first portion. The conductive pattern structures are arranged in a second direction perpendicular to the first direction to form a trench therebetween. The memory layer is formed on sidewalls of the conductive pattern structures. The pillar structures in the trench, each including a channel pattern and a first insulation pattern formed on the memory layer, are spaced apart from each other in the first direction. The second insulation pattern is formed between the pillar structures. The third insulation pattern is formed between some pillar structures, and has a shape different from a shape of the second insulation pattern.

In a method of manufacturing a semiconductor device, a gate structure is formed on a substrate. An ion implantation process is performed at an upper portion of the substrate exposed by the gate structure, so that an ion implantation region is formed to have an expanded volume. The ion implantation process uses ions that are identical to a material of the substrate.

Methods of manufacturing semiconductor devices

A semiconductor device includes an active region defined on a substrate, a gate electrode disposed on the active region and covering two adjacent corners of the active region, a drain area formed in the active region adjacent to a first side of the gate electrode, and a source area formed in the active region adjacent to a second side of the gate electrode. The first and second sides of the gate electrode are spaced apart from each other, and the first side has a bent shape.

Semiconductor device having wave gate

A semiconductor device is provided. A cell region is disposed in a substrate. The cell region includes a memory cell. A peripheral region is disposed in the substrate. The peripheral region is adjacent to the cell region. The peripheral region has a trench isolation, a first active region and a second active region. The trench isolation is interposed between the first active region and the second active region. A common gate pattern is disposed on the peripheral region. The common gate pattern extends in a first direction and partially overlaps the first active region, the second active region and the trench isolation. A buried conductive pattern is enclosed by the trench isolation. The buried conductive pattern extends in a second direction crossing the first direction. A top surface of the buried conductive pattern is lower than a bottom surface of the common gate pattern.

Semiconductor device and method of forming the same

A semiconductor device and a method of fabricating a semiconductor device, the device including an active region on a substrate, the active region being defined by a field region; gate trenches in the active region of the substrate; gate structures respectively formed in the gate trenches; and at least one carrier barrier layer in the substrate and under the gate trenches.

Semiconductor device having buried channel array and method of manufacturing the same

A method of forming a capacitor structure includes forming a mold layer on a substrate, in which the substrate includes a plurality of plugs therein, partially removing the mold layer to form a plurality of openings, in which the plugs are exposed by the openings, forming a plurality of lower electrodes filling the openings, in which the lower electrodes have a pillar shape, removing an upper portion of the mold layer to expose upper portions of the lower electrodes, forming a supporting pattern on exposed upper sidewalls of the lower electrodes and on the mold layer, removing the mold layer, and sequentially forming a dielectric layer and an upper electrode on the lower electrodes and the supporting pattern.

Capacitor structures having supporting patterns and methods of forming the same

There is provided a semiconductor device. The semiconductor device may include multiple contacts plugs, an insulation layer pattern, a metal oxide layer pattern, a metal pattern and a metal line. The contact plugs contact a substrate. The insulation layer pattern is formed between the contact plugs and has a top surface lower than those of the contact plugs. The metal oxide layer pattern is formed on the insulation layer pattern, and has a dielectric constant higher than that of silicon oxide. The metal pattern is formed on the metal oxide layer pattern and contacts sidewalls of the contact plugs. The metal line contacts top surfaces of the contact plugs and the metal pattern and extends thereon.

Semiconductor devices

A semiconductor device is provided. The semiconductor device includes first and second storage electrodes formed to be spaced apart from each other on a substrate, an insulating continuous support pattern connected to top surfaces of the first and second storage electrodes, a storage dielectric layer formed to cover the first and second storage electrodes and the continuous support pattern, and a plate electrode formed on the storage dielectric layer. The continuous support pattern includes a first contact part connected to the top surface of the first storage electrode, a second contact part connected to the top surface of the second storage electrode, and a connection part connecting the first and second contact parts with each other.

Semiconductor device

A semiconductor device includes a buried well, first and second active regions, an isolation layer, and a low resistance region. The buried well is disposed on a substrate and has impurity ions of a first conductivity type. The first and second active regions are disposed on the buried well and each have impurity ions of a second conductivity type, which is different from the first conductivity type. The isolation layer is disposed between the first and second active regions. The low resistance region is disposed between the isolation layer and the substrate and has impurity ions of the second conductivity type. The concentration of impurity ions in the low resistance region is greater than the concentration of the impurity ions in each of the first and second active regions.

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Seoul, South Korea

Jun-Hee Lim