International Business Machines Corporation

Globalfoundries Inc.

Globalfoundries U.S. Inc.

Adeia Semiconductor Bonding Technologies Inc.

Adeia Semiconductor Solutions LLC

Globalfoundaries Inc.

Julien Frougier

Ruilong Xie

Kangguo Cheng

Chanro Park

Nicolas J Loubet

Daniel Chanemougame

Veeraraghavan S Basker

Heng Wu

Steven J Bentley

Ali Razavieh

Andrew Mark Greene

Dimitri Houssameddine

Chen Zhang

Min Gyu Sung

Alexander Reznicek

Juntao Li

Junli Wang

Edward J Nowak

Jingyun Zhang

Bipul C Paul

Huimei Zhou

Bruce Bennett Doris

Dechao Guo

Balasubramanian Pranatharthiharan

Pietro Montanini

Puneet Harischandra Suvarna

Hui Zang

Andreas Knorr

Steven R Soss

Nigel Graeme Cave

Carl John Radens

Lars W Liebmann

Ruqiang Bao

Ravikumar Ramachandran

Kisik Choi

Yi Qi

Miaomiao Wang

Lawrence Alfred Clevenger

Oleg Gluschenkov

Hiroaki Niimi

Su Chen Fan

Eric R Miller

Christopher Joseph Waskiewicz

Sagarika Mukesh

Brent A Anderson

Tenko Yamashita

Shogo Mochizuki

Takeshi Nogami

Wenyu Xu

Min-Hwa Chi

Roy Rongqing Yu

Siva P Adusumilli

Randy W Mann

Frank Wilhelm Mont

Robin Hsin Kuo Chao

Baofu Zhu

Arkadiusz Malinowski

Keith Donegan

Chih-Chao Yang

Anthony K Stamper

Takashi Ando

Effendi Leobandung

Mukta G Farooq

Michael Rizzolo

Judson Robert Holt

Zhenxing Bi

Soon-Cheon Seo

Ekmini Anuja De Silva

Haiting Wang

Yann Mignot

Guillaume Bouche

Xuefeng Liu

Xusheng Kevin Wu

Albert Manhee Chu

Anthony I Chou

Chun-Chen Yeh

Indira P Seshadri

Cheng Chi

Lan Yu

Bartlomiej Jan Pawlak

Srikanth Balaji Samavedam

Zhenyu Hu

William James Taylor, Jr

Rishikesh Krishnan

Andre P Labonte

Jay William Strane

Albert M Young

Daniel J Jaeger

Tao Li

George Robert Mulfinger

Hsien-Ching Lo

Ardasheir Rahman

Ryan W Sporer

Adra Carr

Jia Zeng

Christopher Michael Prindle

Hemant M Dixit

Prasad Bhosale

Eric Miller

Karthik Yogendra

Embodiments of the present invention are directed to processing methods and resulting structures for co-integrating gate-all-around (GAA) nanosheets and comb-nanosheets on the same chip, wafer, or substrate. In a non-limiting embodiment of the invention, a GAA nanosheet device is formed in a first region of a substrate. The GAA nanosheet device includes a first nanosheet stack, a second nanosheet stack, and a first fin spacing distance between the first nanosheet stack and the second nanosheet stack. A comb-nanosheet device is formed in a second region of a substrate. The comb-nanosheet device includes a third nanosheet stack, a fourth nanosheet stack, and a second fin spacing distance between the third nanosheet stack and the fourth nanosheet stack that is less than the first fin spacing distance.

Co-integrating gate-all-around nanosheet transistors and comb-nanosheet transistors

A microelectronic structure including a stacked transistor having a lower transistor and an upper transistor. A shared contact in contact with a lower source/drain of the first lower transistor and an upper source/drain of the upper transistor. The shared contact includes a silicide layer, a metal plug layer, and a conductive metal layer.

Method and structure of forming sidewall contact for stacked FET

A semiconductor device is provided. The semiconductor device includes a field effect transistor (FET) including first and second source/drain (S/D) epitaxial regions. The semiconductor device also includes a gate cut region at cell boundaries between the first and second S/D epitaxial regions, a dielectric liner and a dielectric core formed in the gate cut region, and a backside power rail (BPR) and a backside power distribution network (BSPDN). The semiconductor device also includes a power via passing through the dielectric core and connecting to the BPR and BSPDN, first metal contacts formed in contact with the first and second S/D epitaxial regions, and a via to backside power rail (VBPR) contact. The dielectric liner separates the power via from the first S/D epitaxial region.

Semiconductor device with power via

Vertically stacked, buried power rails are electrically connected to wrap-around contacts or other electrically conductive liners on transistor source/drain regions. The buried power rails are electrically isolated from each other by an electrical insulator. Wrap-around contacts can be electrically connected to different ones of the vertically stacked, buried power rails or to the same buried power rail.

Semiconductor structure having stacked power rails

A semiconductor device includes a first semiconductor layer and a second semiconductor layer. The first semiconductor layer of the semiconductor device includes a standard-gate field-effect transistor. The second semiconductor layer of the semiconductor device includes an extended-gate field-effect transistor. The first semiconductor layer and the second semiconductor layer are formed on top of one another.

Stacked FETS including devices with thick gate oxide

A semiconductor structure is presented including a first source/drain (S/D) epi region having a first contact completely wrapping around the first S/D epi region, the first contact electrically connected to a backside power delivery network (BSPDN) and a second S/D epi region having a second contact directly contacting a first sidewall, a second sidewall, and a top surface of the second S/D epi region, the second contact electrically connected to back-end-of-line (BEOL) components.

Full wrap around backside contact

Embodiments of the invention include a transistor coupled to a memory element, the memory element being in series with a first bistable resistive element that is configured to switch between a first low resistance state and a first high resistance state. A logic circuit is coupled to the transistor via a series connection to a second bistable resistive element, the second bistable resistive element being configured to switch between a second low resistance state and a second high resistance state.

Circuit architecture using transistors with dynamic dual functionality for logic and embedded memory drivers

A resistive random access memory (ReRAM) device is provided. The ReRAM device includes a first electrode including a first conductive layer sandwiching a second conductive layer, the second conductive layer being wider than the first conductive layer; a resistive switching element layer formed in contact with sidewalls of the first electrode, a first portion of the resistive switching element layer that is in contact with the sidewalls of the first conductive layer having a width that is greater than a second portion of the resistive switching element layer that is in contact with the sidewalls of the second conductive layer; and a second electrode that is in contact with the resistive switching element layer.

Resistive switching memory cell

A semiconductor device comprising a first nanosheet located on top of a substrate, wherein the first nanosheet is tapered the Y-direction to have a width Wand the first nanosheet is tapered in the X-direction to have a length L. A second nanosheet located on top of the first nanosheet, wherein the second nanosheets is tapered in the Y-direction to have a width Wand the first nanosheet is tapered in the X-direction to have a length L. Wherein the widths Wand Ware different from each other and the lengths Land Lare different from each other and wherein the substrate includes a tapered surface in the Y-direction.

Gate-all-around nanosheet-FET with variable channel geometries for performance optimization

Semiconductor structures having an increased gate length are provided by providing a vertical stack of suspended semiconductor channel material nanosheets that include a middle portion located between a first end portion and a second end portion. The middle portion of each suspended semiconductor channel material nanosheet is vertically offset from (i.e., higher or lower than) the first end portion and the second end portion of each suspended semiconductor channel material nanosheet.

Increased gate length at given footprint for nanosheet device

Embodiments herein describe FETs with channels connected on the sides to a metal liner. To avoid the difficulties of connecting the sides of the channels to metal liners for the drain and source regions, the embodiments herein form a male/female contact between the channels and the metal liners. In one embodiment, instead of exposing only the end or side surfaces of the channels, an end knob of the channel is exposed. This knob can include the side surface as well as a portion of the top, bottom, front, and back sides of the channel. As such, when the metal liner is deposited on the knob, this metal forms an electrical connection on all sides of the knob. This male/female connection provides a more reliable and lower resistance connection between the channel and the metal liner than using only the end or side surfaces of the channel.

Wrap-around-contact for 2D-channel gate-all-around field-effect-transistors

A semiconductor apparatus includes a substrate; a central vertical pillar of dielectric material protruding upward from the substrate; a left plurality of semiconductor fins protruding horizontally from a left side of the central vertical pillar above the substrate; a right plurality of semiconductor fins protruding horizontally from a right side of the central vertical pillar opposite the left plurality of semiconductor fins; a gate stack surrounding the central vertical pillar and the left and right pluralities of semiconductor fins; and a bottom dielectric insulating layer protruding horizontally left and right of the central vertical pillar below the left and right pluralities of fins and adjacent to the substrate.

Forming dielectric sidewall and bottom dielectric isolation in Fork-FET devices

Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a dynamic random-access-memory (DRAM), and the DRAM includes a vertical transistor and a nanosheet transistor, the vertical transistor being stacked on top of the nanosheet transistor, where a bottom source/drain of the vertical transistor is directly above and connected to a gate of the nanosheet transistor through a conductive via. A method of manufacturing the semiconductor structure is also provided.

Scaled 2T DRAM

A stacked transistor structure including a top source drain region above a bottom source drain region, wherein a width of the bottom source drain region is greater than a width of the top source drain region, a bottom contact structure directly above and in electrical contact with the bottom source drain region, a replacement spacer surrounding the bottom contact structure, and a top gate spacer separating the replacement spacer from a gate conductor.

Stacked transistors having bottom contact with replacement spacer

A fin stack including compressively strained and tensile-strained semiconductor fin regions allows CMOS fabrication to form vertically stacked p-type FinFETs and n-type FinFETs. Aspect ratio trapping within a semiconductor base region within the fin stack provides a relaxed semiconductor base region on which uniaxially strained regions are grown. A dielectric layer may be formed to electrically isolate the compressively strained semiconductor fin region from the tensile-strained semiconductor fin region.

Fin stack including tensile-strained and compressively strained fin portions

Growing community of inventors

Albany, NY, United States of America

Julien Frougier