Canon Nanotechnologies, Inc.

Magic Leap, Inc.

Molecular Imprints, Inc.

Joseph Michael Imhof

Dwayne L LaBrake

Kosta S Selinidis

Michael Nevin Miller

Niyaz Khusnatdinov

Kang Luo

Roy Matthew Patterson

Charles Scott Carden

Satish Sadam

Matthew S Shafran

Qizhen Xue

Kangkang Wang

Jeremy Lee Sevier

Brett William Best

Kosta Selinidis

Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.

Managing multi-objective alignments for imprinting

Imprint lithography templates having alignment marks with highly absorptive material. The alignment marks are insensitive to the effects of liquid spreading and can provide stability and increase contrast to alignment system during liquid imprint filling of template features.

Optically absorptive material for alignment marks

Two-stage imprinting techniques capable of protecting fine patterned features of an imprint lithography template are herein described. In particular, such techniques may be used during fabrication of recessed high-contrast alignment marks for preventing deposited metal layers from coming into contact with fine features etched into the template.

High contrast alignment marks through multiple stage imprinting

Growing community of inventors

Austin, TX, United States of America

Joseph Michael Imhof