Plasma-therm Nes LLC

Hine Automation, LLC

Joseph Barraco

Wei-Hua Hsiao

Vincent Lee

Sarpangala Hariharakeshava Hegde

Raj Subramanya

A method for distinguishing between tilted and multi-stacked substrates in Automated Material-Handling Systems comprising the following steps. A substrate cassette having at least one substrate is provided. The substrate cassette is positioned within the material handling system. Each substrate has a top surface and a bottom surface. A first beam is emitted from a first emitter wherein the first beam is in optical communication with the top surface of the substrate. A second beam is emitted from a second emitter wherein the second beam is in optical communication with the bottom surface of the substrate. The first beam and the second beam are detected using at least one detector while vertically moving the substrate cassette relative to the first emitter or the second emitter.

Method for improved detection of anomalous substrates in automated material-handling systems

The present disclosure provides a method for increased target utilization within a sputtering system. A plurality of targets are provided wherein each target is operatively connected to a central axis. An ion beam is generated within the sputtering system. The generated ion beam is directed at a first location of a first target for a first time period. Each target is moved by rotating the central axis. The generated ion beam is directed at a second location of the first target for a second time period.

Growing community of inventors

Lutz, FL, United States of America

Joseph Barraco