Kla Corporation

Kla Tencor Corporation

Jonathan Madsen

Amnon Manassen

Andrei V Shchegrov

Andrew V Hill

Stilian Pandev

Yoram Uziel

Gilad Laredo

Yossi Simon

A multi-column metrology tool may include two or more measurement columns distributed along a column direction, where the two or more measurement columns simultaneously probe two or more measurement regions on a sample including metrology targets. A measurement column may include an illumination sub-system to direct illumination to the sample, a collection sub-system including a collection lens to collect measurement signals from the sample and direct it to one or more detectors, and a column-positioning sub-system to adjust a position of the collection lens. A measurement region of a measurement column may be defined by a field of view of the collection lens and a range of the positioning system in the lateral plane. The tool may further include a sample-positioning sub-system to scan the sample along a scan path different than the column direction to position metrology targets within the measurement regions of the measurement columns for measurements.

Massive overlay metrology sampling with multiple measurement columns

Growing community of inventors

Los Altos, CA, United States of America

Jonathan Madsen