Opnext, Inc.

Kla-tencor Technologies Corporation

Jon Meyer

Joseph Vanniasinkam

Bor-Long Twu

Christopher Viray

Christian Wolters

Bill H Reysen

Chris H Carroll

Joseph Wai

Yeou-Yen Chen

Systems and methods for inspecting a specimen with light at varying power levels are provided. One system configured to inspect a specimen includes a light source configured to generate light. The system also includes a power attenuator subsystem configured to alter a power level of the light directed to the specimen during inspection between at least two power levels including a full power level and a minimum power level equal to or greater than about 10% of the full power level. In addition, the system includes a detection subsystem configured to generate output responsive to the light scattered from the specimen. The output can be used to detect defects on the specimen.

Systems and methods for inspecting a specimen with light at varying power levels

A grating based demultiplexer module is described. The module includes an integrally formed first section, second section, and third section. The first section includes a diffraction grating formed on the surface of the first section and directs a WDM beam onto the internal surface of the diffraction grating. The third section is positioned to receive angularly separated light from the external surface of the diffraction grating. In some embodiments, the third section can direct individualy beams of the angularly separated light onto the surface of optical detectors. The third section provides structural support and maintains the alignment between the first section and the third section.

Grating based multiplexer/demultiplexer component

A grating based demultiplexer module is described. The module includes an integrally formed first section, second section, and third section. The first section includes a diffraction grating formed on the surface of the first section and directs a WDM beam onto the internal surface of the diffraction grating. The third section is positioned to receive angularly separated light from the external surface of the diffraction grating. In some embodiments,the third section can direct individualy beams of the angularly separated light onto the surface of optical detectors. The third section provides structural support and maintains the alignment between the first section and the third section.

A multiplexer/demultiplexer optical system component that is passively aligned upon assembly is disclosed. The optical system includes a lens block and a mirror-filter block. In some embodiments, optical filters are positioned and epoxyed to the mirror-filter block using a positioning tool. In some embodiments, optical filters are positioned and epoxyed on a support structure which has been etched to receive the optical filters. The mirror-filter block is a block having flat surfaces, one of which is a flat reflecting surface. The lens block is formed by injection molding and includes a barrel for holding and positioning an optical fiber, placement for a collimating lens, and placements for focusing lenses such that, when assembled, light incident on each of the focusing lenses propagates along the optical axis of the focusing lens. In some embodiments, the collimating lens and the focusing lenses are integrally formed with the lens block. In some embodiments, one or more of the collimating lens or focusing lenses are formed separately and inserted into holders integrally formed with the lens block to receive the lens. In some embodiments, the lens block includes a reflecting surfaces that directs light onto the focusing lenses. Assembly and alignment of the multiplexer/demultiplexer involves positioning a flat surface of the mirror-filter block against a receiving surface of the lens block with the filters between them and epoxying the components in place.

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Fremont, CA, United States of America

Jon Meyer