Appfive LLC

Universität De Barcelona

Tescan Brno, S.r.o.

Tescan Orsay Holding, A.s.

Nanomegas Sprl

Tescan Tempe, LLC

Universidad De Barcelona

Jon Karl Weiss

Stavros Nicolopoulos

Steven T Kim

Gerd Ludwig Benner

Petras Stanislav

Lencova Bohumila

Benner Gerd Ludwig

Joaquin Portillo Serra

Bohumila Lencova

Francisca Peiró Martinez

José Manuel Rebled Corsellas

Lluís Yedra Cardona

Amith D Darbal

Stanislav Petras

Sonia Estrade Albiol

Raman D Narayan

Bohumila Lencová

Joaquim Portillo Serra

Steven Kim

A method for automatically aligning a scanning tunneling electron microscope (STEM) for acquiring precession electron diffraction (PED) mapping data includes the generation of an incident electron beam aligned with a STEM optic axis and focused on a sample region. A non-inclined signal is acquired of the spatial distribution from the sample region, by scanning the aligned incident beam across multiple discrete locations and acquiring a signal associated with each location. The method can further include the inclination of the incident electron beam to a fixed inclination angle relative to the optic axis and then acquiring an inclined signal spatial distribution from the sample region by scanning the inclined incident beam across the multiple discrete locations while applying a cyclic azimuthal scanning protocol to the inclined beam and acquiring a signal associated with each location. An azimuthal spatial alignment correction is determined by comparing the non-inclined and inclined signal spatial distributions.

Method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mapping

A scanning transmission electron microscope is adapted to acquire high quality precession electron diffraction (PED) patterns by means of separated scanning deflectors and precession deflectors. Magnetic or electrostatic deflectors may be used for scanning and for precession. This enables independent optimization of parameters for each deflection system to achieve a broad operating range simultaneously for both deflection systems.

Scanning transmission electron microscope

A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.

Method and system for improving characteristic peak signals in analytical electron microscopy

A process for measuring strain is provided that includes placing a sample of a material into a TEM as a sample. The TEM is energized to create a small electron beam with an incident angle to the sample. Electrical signals are generated that control multiple beam deflection coils and image deflection coils of the TEM. The beam deflection control signals cause the angle of the incident beam to change in a cyclic time-dependent manner. A first diffraction pattern from the sample material that shows dynamical diffraction effects is observed and then one or more of the beam deflection coil control signals are adjusted to reduce the dynamical diffraction effects. One or more of the image deflection coil control signals are then adjusted to remove any motion of the diffraction pattern. A diffraction pattern is then collected from a strained area of the material after the adjusting step, and the strain is then determined from a numerical analysis of the strained diffraction pattern compared to a reference diffraction pattern from an unstained area of the material.

System and process for measuring strain in materials at high spatial resolution

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Tempe, AZ, United States of America

Jon Karl Weiss