Amkor Technology, Inc.

Johnnie Quan

August Joseph Miller, Jr

Jeffery Alan Miks

Kurt Raymond Raab

Methods for temporary bussing of semiconductor package substrates are disclosed and may include metal plating regions of a packaging substrate utilizing a plurality of bussed traces, which may be decoupled by forming debuss holes at intersections of the bussed traces. The decoupled traces may then be electrically tested, and the packaging substrate may be singulated into a plurality of substrates utilizing a sawing process through singulation areas in the packaging substrate. The traces may be electrically coupled via plating bars in the substrate. The plating bars may be located in the singulation areas. The intersections of the bussed traces may be in a Y pattern, which may be repeated along the singulation areas. The debuss holes may be formed utilizing mechanical drilling or lasing. The regions of the packaging substrate may be metal plated utilizing an electroplating process. The plurality of bussed traces may be biased for the electroplating process.

Methods for temporary bussing of semiconductor package substrates

An electrical circuit having a spatially-efficient MEMS architecture, substantially as shown in and/or described in connection with at least one of the figures, as set forth more completely in the claims.

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Chandler, AZ, United States of America

Johnnie Quan