Micron Technology Incorporated

John Damiano, Jr

Monte Manning

Shubneesh Batra

Sanjay K Banerjee

A thin film transistor includes: a) a thin film transistor layer comprising a source region, a channel region and a drain region; the thin film transistor layer further comprising a drain offset region positioned between the drain region and the channel region; b) the channel region being substantially polycrystalline and having a first average crystalline grain size; and c) the drain offset region being substantially polycrystalline and having a second average crystalline grain size, the second average crystalline grain size being larger than the first average crystalline grain size. A method for forming such a construction using polycrystalline materials, preferably polysilicon, and an amorphizing silicon implant with subsequent recrystallization is also disclosed.

Thin film transistors and method of forming thin film transistors

Thin film transistor and method of forming thin film transistors

Thin film transistors

Method of forming thin film transistors

Thin film transistor with large grain size DRW offset region and small

Growing community of inventors

Austin, TX, United States of America

John Damiano, Jr