Average Co-Inventor Count = 6.43
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tma Technologies, Inc. (2 from 3 patents)
2 patents:
1. 5416590 - Apparatus and process for measuring gap and mismatch
2. 5196906 - Modular scatterometer with interchangeable scanning heads