Average Co-Inventor Count = 4.43
ph-index = 25
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (95 from 13,713 patents)
2. International Business Machines Corporation (13 from 164,197 patents)
3. Other (1 from 832,843 patents)
4. Siemens Aktiengesellschaft (1 from 30,045 patents)
5. Lam Research Corporation (1 from 3,777 patents)
109 patents:
1. 12205791 - Rating substrate support assemblies based on impedance circuit electron flow using machine learning
2. 12142458 - Symmetric plasma source to generate pie-shaped treatment
3. 12100576 - Metal oxide preclean chamber with improved selectivity and flow conductance
4. 12080519 - Smart dynamic load simulator for RF power delivery control system
5. 12027354 - Cleaning of SIN with CCP plasma or RPS clean
6. 12014906 - High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber
7. 11915918 - Cleaning of sin with CCP plasma or RPS clean
8. 11915917 - Methods and apparatus for reducing sputtering of a grounded shield in a process chamber
9. 11898236 - Methods and apparatus for processing a substrate
10. 11887818 - Methods and systems to modulate film stress
11. 11823871 - Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool
12. 11315769 - Plasma source for rotating susceptor
13. 11315763 - Shaped electrodes for improved plasma exposure from vertical plasma source
14. 11170982 - Methods and apparatus for producing low angle depositions
15. 11158489 - Methods and systems to modulate film stress