Entegris, Inc.

Other

Ford Motor Company Limited

United States of America As Represented by the Secretary of the Air Force

Semifab Incorporated

John Burns

Mark Vincent Smith

Matthew A Fuller

Martin L Forbes

Jeffery J King

Russ V Raschke

Michael Shawn Adams

Eric S Olson

Dustin W Burns

James A Watson

Michael C Zabka

Nancy Jean Britten

Niki Ann Waldron

Robert E Simpson

Thomas R Morgan

Thomas W Travis

Jeffrey J King

David A McGuffie

Gary M Gallagher

Jeffrey M Liedel

Gerald D Reynolds

Grady L Ripley

J Kevin Vasconi

Robert W Krutz, Jr

Leo W Darley

Ronald C Hill

Thomas D Cornellier

Thor Ibsen

A substrate container includes a container portion having an open side or bottom, and a door to sealingly close the open side or bottom, one of the door and the container portion defining access structure. The substrate container additionally includes a check-valve assembly, the check-valve assembly being retained with respect to the access structure to provide fluid communication with an interior of the substrate container. The check-valve assembly includes a grommet, the grommet being formed of an elastomeric material. A valve seat is disposed within the grommet, the valve seat being integrally formed with the grommet according to one aspect, and being formed of a separate piece according to another aspect. An elastomeric valve member, specifically an elastomeric umbrella valve member according to one aspect, is disposed within the grommet and held to engage the valve seat, thereby restricting fluid flow through the check-valve assembly with respect to the interior of the substrate container.

Substrate container valve assemblies

A semiconductor wafer container assembly includes a container defining an exterior and defining an interior having a wafer storage area adapted to support one or more semiconductor wafers. The container also defines an opening in the container between the exterior and the interior. The container has a door and a latching mechanism to sealingly secure the door closed, and the door is openable for access to the wafer storage area. A passive getter module is removably secured with respect to the exterior of the container by substantially rigid connection structure that is a part of or extends from substantially rigid getter module housing. Getter material is disposed within the housing to decrease concentration of contaminants within the wafer storage area of the container via the access opening and the opening in the container.

Wafer container with external passive getter module

Magazine release button interference pin assembly and AR-style lower receiver functions to prevent the depression of the magazine release button on an AR-style rifle while the upper receiver is closed or locked onto the lower receiver. Magazine release button interference pin assembly and AR-style lower receiver prevents magazine release and reloading while the upper receiver is closed or locked onto the lower receiver. Magazine release button interference pin assembly and AR-style lower receiver is a magazine release button interference pin assembly as well as a specially machined lower receiver to accept the magazine release button interference pin assembly. Magazine release button interference pin assembly includes a special magazine release button interference pin with at least two protrusions, a spring, and a retaining pin.

Magazine release button interference pin assembly and AR-style lower receiver

A wafer container utilizes a rigid polymer tubular tower with slots and a 'getter' therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.

Wafer container with tubular environmental control components

An improved system and method for purging a microenvironment to desired levels of relative humidity, oxygen, or particulates through the implementation of a purge gas delivery apparatus and method that provides even distribution of the purging gas within the microenvironment. A substrate container has a tower therein with a fluid flow passageway extending the length of the tower. Apertures with porous media between the aperture and fluid flow passageway regulate the volume and pressure of air discharging at each aperture. Alternatively, the tower may be formed of a porous tubular polymeric material. A sleeve may direct the discharge purge gas in the interior.

Porous barrier for evenly distributed purge gas in a microenvironment

AR-style lower receiver with magazine release button interference pin assembly functions to prevent the depression of the magazine release button on an AR-style rifle while the upper receiver is closed or locked onto the lower receiver. AR-style lower receiver with magazine release button interference pin assembly prevents magazine release and reloading while the upper receiver is closed or locked onto the lower receiver. AR-style lower receiver with magazine release button interference pin assembly is a magazine release button interference pin assembly as well as a specially machined lower receiver to accept the magazine release button interference pin assembly. Magazine release button interference pin assembly includes a special magazine release button interference pin with at least two protrusions, a spring, and a retaining pin.

A breather assembly mounted to the purge port of a substrate carrier for coupling with a tool port. In various embodiments, the breather assembly comprises a grommet that presents either a planar or a concave mounting face for coupling to the tool port. In one embodiment, the grommet is of a 'solid compliant' construction, wherein the mounting face complies with the mouth of the tool port without substantially changing shape. In other embodiments, the grommet is of a 'flexible compliant' construction, wherein the grommet changes shape when engaged with the tool port. The grommet can be configured so that the force (pressure-area product) exerted in the direction towards the tool port is greater than the force exerted in the direction away from the tool port, thereby enhancing the seal between the grommet and the tool port.

Substrate container with purge ports

A wafer container an enclosure portion including a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and a wafer support structure including two side wafer supports 5 each side wafer support including a removable backstop. The invention includes maintaining wafer containers by replacing the removable backstop. The invention includes converting shipping containers that ship large diameter wafers vertically to containers to be used in fabrication facilities that store wafers horizontally for robotic pickup for processing.

Replaceable wafer support backstop

Substrate shipper component

A golf putter training device is described. The training device includes a bracket having a first end configured to be attached to the putter shaft and a second end connected to a support shaft, a first visual guide connected to the support shaft and extending in a direction away from the bracket first end and at an angle to the plane formed by the putter shaft and the putter head and on a first side of the plane, and a second visual guide connected to the support shaft and extending in a direction away from the bracket first end and at an angle to the plane formed by the putter shaft and the putter head and on the second side of the plane. In another embodiment, the training device includes a third and fourth visual guide. In yet another embodiment, the training device includes visual indicators.

Golf putter training device

A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.

Wafer container with door actuated wafer restraint

A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.

Front opening substrate container with bottom plate

Growing community of inventors

Colorado Springs, CO, United States of America

John Burns