Advanced Diamond Technologies, Inc.

Uchicago Argonne, LLC

Other

University of Illinois

University of Chicago

John Crane Inc.

John Arthur Carlisle

Orlando H Auciello

Hongjun Zeng

Ian Wakefield Wylie

Prabhu U Arumugam

Dieter M Gruen

Charles E West

Nicolaie A Moldovan

James Netzel

Ian Wylie

Neil Kane

James Birrell

Matthew Alexander Meitl

John A Rogers

Etienne Menard

Anirudha V Sumant

Alan R Krauss

Charles L Goldsmith

Robert W Carpick

Won Mook Choi

Derrick C Mancini

Dae Hyeong Kim

Donato M Ceres

Suresh Sampath

Chris Gudeman

James Hwang

Jennifer Gerbi

Shabnam Siddiqui

Tae Ho Kim

Xingcheng Xiao

Matthew Hart

A durable composite diamond electrode is disclosed which comprise at least a relatively thicker conductive UNCD (Ultrananocrystalline Diamond) layer, with low deposition cost, on a substrate underlying a relatively thinner conductive MCD (Microcrystalline Diamond) layer. The electrode exhibits long life and superior delamination resistance under extremely stressed electrochemical oxidation conditions. It is hypothesized that this improvement in electrode reliability is due to a combination of stress relief by the composite film with the slightly 'softer' underlying UNCD 'root' layer and the electrochemically durable overlying MCD &#x201c;shield&#x201d; layer, an effective disruption mechanism of the fracture propagation between the compositing layers, and thermal expansion coefficient match between the diamond layers and the substrate. The diamond composite electrode can be applied to any electrochemical application requiring extreme voltages/current densities, extreme reliability or biomedical inertness such as electrochemical systems to generate ozone, hydroxyl radicals, or biomedical electrode applications.

Extreme durability composite diamond electrodes

A novel composite diamond film comprising of a relatively thick layer of UNCD (Ultrananocrystalline Diamond) with a Young's modulus of less than 900 GPa and a relatively thin MCD (microcrystalline diamond) outermost layer with a Young's modulus of greater than 900 GPa, has been shown to exhibit superior delamination resistance under extreme shear stress. It is hypothesized that this improvement is due to a combination of stress relief by the composite film with a slightly 'softer' UNCD layer, a disruption of the fracture mechanism through the composite layer(s), and the near ideal chemical and thermal expansion coefficient match between the two diamond layers. The combination of a thick but 'softer' underlying UNCD layer with a thin but harder overlying MCD layer provides an excellent compromise between the low deposition cost and smoothness of UNCD with the extreme hardness and unparalleled chemical, electrochemical and immunological inertness of even a thin layer of MCD. The MCD layer's roughness is minimized and its adhesion maximized by the use of a thin layer of MCD and its deposition on the smooth surface of the chemically nearly identical underlying UNCD layer. The composite film can be applied to any application currently utilizing a diamond or a similar hard film, including cutting tools, abrasive surfaces, electrochemistry, biomedical applications such as human implants or thermally conductive films and the like, requiring superior durability, chemical resistance and/or immunological inertness.

Extreme durability composite diamond film

An electrochemical system and method are disclosed for On Site Generation (OSG) of oxidants, such as free available chlorine, mixed oxidants and persulfate. Operation at high current density, using at least a diamond anode, provides for higher current efficiency, extended lifetime operation, and improved cost efficiency. High current density operation, in either a single pass or recycle mode, provides for rapid generation of oxidants, with high current efficiency, which potentially allows for more compact systems. Beneficially, operation in reverse polarity for a short cleaning cycle manages scaling, provides for improved efficiency and electrode lifetime and allows for use of impure feedstocks without requiring water softeners. Systems have application for generation of chlorine or other oxidants, including mixed oxidants providing high disinfection rate per unit of oxidant, e.g. for water treatment to remove microorganisms or for degradation of organics in industrial waste water.

Electrochemical system and method for on-site generation of oxidants at high current density

The present invention relates to an apparatus for the production of ozone from water comprising at least one cell, consisting of an anode, a cathode and an interposed cation-conducting membrane, wherein the membrane conductively connects the anode and the cathode while forming flow channels for water that are separated from one another as anode and cathode chambers and wherein the flow channels are configured to allow for the recirculation of the water flow within the chambers. The present invention further relates to an electrochemical method and apparatus for producing ozone or dissolved ozone in water in high concentrations by mean of recirculation of water between at least one chamber and at least one water tank.

Recycling loop method for preparation of high concentration ozone

A diamond electrode and a diamond microelectrode array for biosensors and electroanalytical applications, such as electrochemical impedance spectroscopy (EIS), are disclosed. The electrode comprises a layer of ultra-smooth conductive nanocrystalline diamond (NCD) having a resistivity of &#x3e;0.05 &#x3a9;cm and a surface roughness of &#x3c;20 nm R. Preferably, the diamond layer comprises boron or nitrogen-doped ultrananocrystalline diamond (UNCD) having an average grain size &#x3c;10 nm and a surface roughness &#x3c;10 nm R. It may be patterned to define a microelectrode array with a plurality of individually addressable electrodes, each having a diameter in the range from 100 nm to 100 &#x3bc;m. The surface of each microelectrode is hydrogen-terminated before bio-functionalization, i.e. modifying with sensing molecules for detection of a specific biological or chemical target and coating with a blocker for reducing non-specific binding. These diamond electrodes exhibited substantial increases in sensitivity, selectivity and signal reproducibility, e.g. for detection ofK12 using EIS.

Electroanalytical sensor based on nanocrystalline diamond electrodes and microelectrode arrays

The present invention describes a microfabricated or nanofabricated structured diamond abrasive with a high surface density array of geometrical protrusions of pyramidal, truncated pyramidal or other shape, of designed shapes, sizes and placements, which provides for improved conditioning of CMP polishing pads, or other abrasive roles. Three methods of fabricating the structured diamond abrasive are described: molding of diamond into an array of grooves of various shapes and sizes etched into Si or another substrate material, with subsequent transferal onto another substrate and removal of the Si; etching of an array of geometrical protrusions into a thick diamond layer, and depositing a thick diamond layer over a substrate pre-patterned (or pre-structured) with an array of geometrical protrusions of designed sizes, shapes and placements on the surface.

Nano-fabricated structured diamond abrasive article

A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a 'fast discharge diamond dielectric layer' and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

RF-MEMS capacitive switches with high reliability

Various heat-sinked components and methods of making heat-sinked components are disclosed where diamond in thermal contact with one or more heat-generating components are capable of dissipating heat, thereby providing thermally-regulated components. Thermally conductive diamond is provided in patterns capable of providing efficient and maximum heat transfer away from components that may be susceptible to damage by elevated temperatures. The devices and methods are used to cool flexible electronics, integrated circuits and other complex electronics that tend to generate significant heat. Also provided are methods of making printable diamond patterns that can be used in a range of devices and device components.

Printable, flexible and stretchable diamond for thermal management

A method comprising: providing at least one first diamond film comprising polycrystalline diamond, e.g., nanocrystalline or ultrananocrystalline diamond, disposed on a substrate, wherein the first diamond film comprises a surface comprising diamond asperities and having a first diamond film thickness, removing asperities from the first diamond film to form a second diamond film having a second diamond film thickness, wherein the second thickness is either substantially the same as the first thickness, or the second thickness is about 100 nm or less thinner than the first diamond film thickness, optionally patterning the second diamond film to expose substrate regions and, optionally, depositing semiconductor material on the exposed substrate regions, and depositing a solid layer on the second diamond film to form a first layered structure. Applications include for example dielectric isolation in the semiconductor industry, as well as surface acoustic wave devices, scanning probe microscope, and atomic force microscope devices.

Controlling diamond film surfaces and layering

Diamond SPM and AFM probes which are durable, particularly for scanning hard surfaces such as diamond surfaces. Interlayers and seeding can be used to improve diamond deposition, and the diamond can be ultrananocrystalline diamond (UNCD). Tip sharpening improves resolution.

Diamond film deposition and probes

A device including a layered heterostructure with an oxygen-containing material, with a carbon layer and an amorphous oxygen diffusion barrier protecting the carbon layer from etching by oxygen. One or more of a metal, a carbide or an oxide may be in contact with the amorphous oxygen diffusion barrier that has the lowest free energy of oxide formation in the device. Various devices are disclosed as are varieties of carbon allotropes. Methods of protecting carbon, such as diamond from the oxygen etching in processes such as device manufacture are also disclosed.

Integration of dissimilar materials for advanced multifunctional devices

A method of depositing nanocrystalline diamond film on a substrate at a rate of not less than about 0.2 microns/hour at a substrate temperature less than about 500&#xb0; C. The method includes seeding the substrate surface with nanocrystalline diamond powder to an areal density of not less than about 10sites/cm, and contacting the seeded substrate surface with a gas of about 99% by volume of an inert gas other than helium and about 1% by volume of methane or hydrogen and one or more of acetylene, fullerene and anthracene in the presence of a microwave induced plasma while maintaining the substrate temperature less than about 500&#xb0; C. to deposit nanocrystalline diamond on the seeded substrate surface at a rate not less than about 0.2 microns/hour. Coatings of nanocrystalline diamond with average particle diameters of less than about 20 nanometers can be deposited with thermal budgets of 500&#xb0; C.-4 hours or less onto a variety of substrates such as MEMS devices.

Method to grow pure nanocrystalline diamond films at low temperatures and high deposition rates

An ultrananocrystalline diamond (UNCD) having an average grain size between 3 and 5 nanometers (nm) with not more than about 8% by volume diamond having an average grain size larger than 10 nm. A method of manufacturing UNCD film is also disclosed in which a vapor of acetylene and hydrogen in an inert gas other than He wherein the volume ratio of acetylene to hydrogen is greater than 0.35 and less than 0.85, with the balance being an inert gas, is subjected to a suitable amount of energy to fragment at least some of the acetylene to form a UNCD film having an average grain size of 3 to 5 nm with not more than about 8% by volume diamond having an average grain size larger than 10 nm.

Growing community of inventors

Plainfield, IL, United States of America

John Arthur Carlisle