Fei Comapny

Johannes Antonius Maria Van Den Oetelaar

Pleun Dona

Remco Schoenmakers

Erik Pieter Van Gaasbeek

Uwe Luecken

Albert Visscher

Gerbert Jeroen Van De Water

Jeroen De Boeij

Casper Maria Smit

Frank Nederlof

Ian Johannes Bernardus Van Hees

Jorn Hermkens

Wim Wondergem

Paul Johannes Leonardes Barends

A method of using a Charged Particle Microscope comprising:

Charged particle microscope with vibration detection / correction

The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.

Method for electron tomography

A method and apparatus for reducing drift in a charged particle beam system. The method includes providing a charged particle beam column including a charged particle beam, a lens system, and a sample chamber; disposing a temperature-controlled device between the lens system and the sample chamber to control heat transfer between the lens system and the sample chamber; and controlling the temperature of the temperature-controlled device to reduce or eliminate the thermal drift of the position of a sample within the sample chamber relative to the position of the charged particle beam.

Drift control in a charged particle beam system

A charged-particle optical system () such as an electron microscope has a vacuum chamber () with a space () for accommodating a specific one () of multiple specimens in operational use. The charged-particle optical system has a loader () with a part () that is moveable into and out of the space. The part is configured for attaching a specimen carrier (), brought from outside the system, to a first holder () or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface () in a wall of the chamber for removably accommodating the first holder () or a second holder () with a second specimen () mounted thereon.

Charged-particle optical system with dual loading options

The invention relates to a transfer mechanism for transferring a specimen () from a first position in a first holder () to a second position in a second holder () and/or vice versa, each holder () equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders () a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders () when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (). At least one of the holders () may be equipped to hold a multitude of specimens.

Transfer mechanism for transferring a specimen

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Eindhoven, Netherlands

Johannes Antonius Maria Van Den Oetelaar