Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Jochen Rentsch

Daniel Biro

Ralf Preu

Andreas Wolf

Daniel Kray

Andreas Grohe

Jan-Frederik Nekarda

Kuno Mayer

Filip Granek

Elias Kirchgässner

Marc Hofmann

Arpad Mihai Rostas

Eva Zimmer

Martin Zimmer

Teresa Orellana Peres

Mark Schumann

Johannes Seiffe

Florian Pillath

Daniel Trogus

A liquid agent for the surface treatment of monocrystalline wafers, which contains an alkaline etching agent and also at least one low-volatile organic compound. Systems of this type can be used both for the cleaning, damage etch and texturing of wafer surfaces in a single etching step and exclusively for the texturing of silicon wafers with different surface quality, whether it now be wire-sawn wafers with high surface damage or chemically polished surfaces with minimum damage density.

Texturing and cleaning agent for the surface treatment of wafers and use thereof

A method for local contacting and local doping of a semiconductor layer including the following process steps: A) Generation of a layer structure on the semiconductor layer through i) application of at least one intermediate layer on one side of the semiconductor layer, and ii) application of at least one metal layer onto the intermediate layer last applied in step i), wherein the metal layer at least partly covers the last applied intermediate layer, B) Local heating of the layer structure in such a manner that in a local region a short-time melt-mixture of at least partial regions of at least the layers: metal layer, intermediate layer and semiconductor layer, forms. After solidification of the melt-mixture, a contacting is created between metal layer and semiconductor layer. It is essential that in step A) i) at least one intermediate layer designed as dopant layer is applied, which contains a dopant wherein the dopant has a greater solubility in the semiconductor layer than the metal of the metal layer.

Method for local contacting and local doping of a semiconductor layer

Growing community of inventors

Emmendingen, Germany

Jochen Rentsch