Microsoft Technology Licensing, LLC

Advanced Micro-fabrication Equipment Inc. China

Schneider Electric It Corporation

Jie Du

Jie Jerry Liu

Jun Chen

Yue Chen

Chuanbo Zhang

Huajun Luo

David C James

Daniel Ward

Leyu Feng

Justin K Stanton

Chung Man Yiu

Jerry Liu

Sha Rin

Haibing Wang

XueYin Jiang

Yumin Guo

ZhongGang Li

Shakir Hussain Basheer

Guanglin Zhu

Jian Wang

Disclosed are a multi-zone heating apparatus, a bottom electrode assembly, a plasma processing apparatus, and a temperature adjusting method, wherein the multi-zone heating apparatus includes: a plurality of foil heaters; a plurality of switches, each switch being connected with a foil heater to form a heating unit; two ends of the plurality of heating units are connected to a ground bus and a power supply bus, respectively; a plurality of driving wires, each driving wire being connected with a switch and configured to transmit a control signal of the duty cycle of the switch, the switches being configured to independently control the operating time of the connected foil heaters based on the control signal. The multi-zone heating apparatus can be integrated between the electrostatic chuck and the base in the plasma processing apparatus and can reduce use of external conductive wires, thereby reducing the demand for filters.

Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting method

Displaying a hierarchy. A method includes identifying a set of nodes representing sites in a hierarchy. The set of nodes share one or more common characteristics not shared by any other nodes in the hierarchy. The method further includes determining that the set of nodes, as a set, meet a predetermined condition. As a result of the nodes sharing the one or more common characteristics not shared by any other nodes in the hierarchy and as a result of the set meeting the predetermined condition, the method further includes aggregating at least a portion of the set of nodes. The method further includes displaying in a graphical user interface a representation of the hierarchy including displaying the aggregated portion as a single entity in the hierarchy.

Relationship visualization and graphical interaction model in IT client management

Granular inventory management with conflict resolution at a target is provided. A client receives inventory management requests, as default settings and/or from a server. Each request includes action instance(s), which have an action key, action type, action detail(s), a precedence, and a sequence number. The client identifies a conflict if two instances have the same action type but incompatible detail(s). The client resolves the conflict, based on precedence and sometimes also on sequence numbers. The client performs the resulting action instance(s), and results are sent back for inclusion in an inventory report. Action details may specify a schedule for recurring actions. A precedence may be specified by an administrator or be built-in. Default and other requests may be defined by viewing inventory classes in a graphical user interface, entering an action based on inventory class(es), and entering target device group selection(s). Inventory classes may be captured from a live system.

Granular client inventory management with conflict resolution

Relationship visualization and graphical interaction model in it client management

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Shanghai, China

Jie Du