Taiwan Semiconductor Manufacturing Comp. Ltd.

Jiao-Rou Liao

Jiun-Rong Pai

Hsu-Shui Liu

Shou-Wen Kuo

Cheng-Kang Hu

Sheng-Hsiang Chuang

A system and method for defect detection in a hole array on a substrate is disclosed herein. In one embodiment, a method for defect detection in a hole array on a substrate, includes: scanning a substrate surface using at least one optical detector, generating at least one image of the substrate surface; and analyzing the at least one image to detect defects in the hole array on the substrate surface based on a set of predetermined criteria.

Method and system for map-free inspection of semiconductor devices

A method for scanning and analyzing a surface, the method comprising: receiving a piece of equipment with a target surface for inspection; receiving an input from a user; determining at least one scan parameter based on the user input; scanning the target surface using an optical detector in accordance with the at least one scan parameter; generating an image of the target surface; correcting the image of the target surface to remove at least one undesired feature to generate a corrected image based on the at least one scan parameter; and analyzing the corrected image to determine at least one geometric parameter of the target surface.

Growing community of inventors

Taichung, Taiwan

Jiao-Rou Liao