Mv Systems, Inc.

Glasstech Solar, Inc.

Jianping Xi

Arun Madan

Scott Morrison

A hot wire chemical vapor deposition method and apparatus for fabricating high quality amorphous, micro-crystalline, and poly-crystalline thin film silicon, or related materials, devices and large area modules is described. A silane gas impinges upon a hot graphite rod assembly whereas the gas is broken up into its individual constituents, these constituents then depositing on an inert substrate member. The distance between the hot graphite rod assembly and the substrate member is adjustable. A shutter is provided to shield the substrate member as the hot graphite rod assembly is heating up. The hot graphite rod assembly contains a plurality of mutually parallel and coplanar rods that are parallel to the plane of the substrate member, and the hot graphite rod assembly and/or the substrate is oscillated in a direction generally normal to the direction in which the rods extend.

Hot wire chemical vapor deposition method and apparatus using graphite hot rods

A solar cell fabrication method and solar cell made by the method wherein a grid of point electrical connections is made to a transparent first electrode layer of the cell through a layer of a-Si semiconductor material which is sandwiched between the first electrode layer and a second back electrode layer. A dielectric layer electrically insulates the back electrode layer and the grid of point electrical connections. An electrically conducting network is deposited on the dielectric layer and electrically interconnects the grid of point electrical connections. The resulting cell has a relatively low active area loss and a relatively low electrical power loss due to the electrical connections in the cell.

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Golden, CO, United States of America

Jianping Xi