International Business Machines Corporation

Jer-Mind Yang

Burn J Lin

Bea-Jane L Yang

A patterned image including on a substrate, a patterned image of a first resist polymeric material and patterned image of a second and different resist material on the first resist polymeric material. The polymeric material contains reactive hydrogen functional groups and/or reactive hydrogen precursor groups. At least the surface layer of the delineated and uncovered first resist polymer material is reacted with a multifunctional organometallic material containing at least two functional groups that are reactive with the functional groups of the polymeric material.

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Yorktown Heights, NY, United States of America

Jer-Mind Yang