Taiwan Semiconductor Manufacturing Comp. Ltd.

Jeng-Shyan Lin

Dun-Nian Yaung

Jen-Cheng Liu

Feng-Chi Hung

Wen-De Wang

Chun-Chieh Chuang

Shu-Ting Tsai

Shuang-Ji Tsai

Min-Feng Kao

Tzu-Hsuan Hsu

Szu-Ying Chen

Wen-I Hsu

Hsun-Ying Huang

Cheng-Ying Ho

Ching-Chun Wang

Yueh-Chiou Lin

Chien-Hsien Tseng

Shih-Pei Chou

Shou-Gwo Wuu

Shih Pei Chou

Ho-Ching Chien

Ying-Ling Tsai

Shyh-Fann Ting

Sin-Yao Huang

Kai-Chun Hsu

Yu-Yang Shen

Wei-Chih Weng

Sheng-Chau Chen

Volume Chien

Hsin-Hui Lee

Chih-Hui Huang

U-Ting Chen

Chia-Chieh Lin

Yan-Chih Lu

Sou-Kuo Wu

Ho-Ching Chen

Keng-Yu Chou

Hsing-Chih Lin

Chia-Wei Liu

Chung-Chuan Tseng

Pao-Tung Chen

Hung-Jen Hsu

Han-Chi Liu

Chun-Ming Su

Jyh-Ming Hung

Feng-Kuei Chang

Feng-chi Hung

Cheng-Jong Wang

Dun-Nian Yuang

A method includes bonding a first wafer to a second wafer, with a first plurality of dielectric layers in the first wafer and a second plurality of dielectric layers in the second wafer bonded between a first substrate of the first wafer and a second substrate in the second wafer. A first opening is formed in the first substrate, and the first plurality of dielectric layers and the second wafer are etched through the first opening to form a second opening. A metal pad in the second plurality of dielectric layers is exposed to the second opening. A conductive plug is formed extending into the first and the second openings.

Stacked integrated circuits with redistribution lines

Various embodiments of the present disclosure are directed towards a method for forming a semiconductor device including a shallow trench isolation (STI) structure disposed between a first side and a second side of the semiconductor substrate. An intermetal dielectric structure comprising a first metal interconnect is on the second side. A first etching process is performed to form a first trench extending from the first side of the semiconductor substrate to the STI structure. A dielectric layer is deposited on the first side. A dielectric material is deposited into the first trench to form a dielectric spacer. A second trench is etched during a second etching process. The second trench is aligned with the first trench and extends through the STI structure to the first metal interconnect. A conductive material is deposited into the second trench to form a contact pad that contacts the first metal interconnect.

Isolation structure for bond pad structure

Various embodiments of the present disclosure are directed towards a method for forming an integrated chip including a substrate having an upper surface vertically below a top surface. A dielectric structure contacts the top surface of the substrate. A conductive structure is disposed in the substrate. The conductive structure includes an upper conductive body and conductive protrusions directly underlying the upper conductive body. The upper conductive body overlies the upper surface of the substrate. A bottom surface of the dielectric structure is disposed between a top surface and a bottom surface of the upper conductive body. An isolation structure is disposed in the substrate on opposing sides of the upper conductive body.

The present disclosure, in some embodiments, relates to a method of forming an integrated chip structure. The method includes forming a first dielectric bonding layer over a first dielectric structure, which is disposed on a first substrate and surrounds a first plurality of interconnects. The first dielectric bonding layer is patterned to form a first recess exposing one of the first plurality of interconnects. A first conductive bonding segment is formed within the first recess. A second dielectric bonding layer is formed over a TSV extending through a second substrate. The second dielectric bonding layer is patterned to form a second recess exposing the TSV. A second conductive bonding segment is formed within the second recess. The first substrate is bonded to the second substrate along an interface comprising dielectric and conductive regions. The conductive region includes a conductive interface between the first and second conductive bonding segments.

Stacked substrate structure with inter-tier interconnection

The present disclosure relates to a semiconductor structure. The semiconductor structure includes a dielectric layer having a first dielectric surface and a second dielectric surface opposite to the first dielectric surface. The dielectric layer defines a recess in the first dielectric surface, and the recess includes a sidewall of the dielectric layer. A first conductive layer contacts a bottom surface of the dielectric layer. The sidewall of the dielectric layer is directly over the first conductive layer. A second conductive layer contacts the first conductive layer and the dielectric layer. The second conductive layer vertically extends from the first conductive layer to above the dielectric layer. A third conductive layer contacts the second conductive layer. The third conductive layer is laterally separated from a sidewall of the second conductive layer that faces the third conductive layer by a non-zero distance.

Pad structure for front side illuminated image sensor

An image-sensor device is provided. The image-sensor device includes a semiconductor substrate and a radiation-sensing region in the semiconductor substrate. The image-sensor device also includes a doped isolation region in the semiconductor substrate and a dielectric film extending into the doped isolation region from a surface of the semiconductor substrate. A portion of the doped isolation region is between the dielectric film and the radiation-sensing region.

Mechanisms for forming image-sensor device with deep-trench isolation structure

A stacked integrated circuit (IC) device and a method are disclosed. The stacked IC device includes a first semiconductor element. The first substrate includes a dielectric block in the first substrate; and a plurality of first conductive features formed in first inter-metal dielectric layers over the first substrate. The stacked IC device also includes a second semiconductor element bonded on the first semiconductor element. The second semiconductor element includes a second substrate and a plurality of second conductive features formed in second inter-metal dielectric layers over the second substrate. The stacked IC device also includes a conductive deep-interconnection-plug coupled between the first conductive features and the second conductive features. The conductive deep-interconnection-plug is isolated by dielectric block, the first inter-metal-dielectric layers and the second inter-metal-dielectric layers.

Interconnect structure for stacked device

The present disclosure, in some embodiments, relates to an integrated chip structure. The integrated chip structure includes a first plurality of interconnects within a first dielectric structure on a first substrate, and a second plurality of interconnects within a second dielectric structure on a second substrate. A bonding structure is arranged between the first dielectric structure and the second substrate. An inter-tier interconnect structure extends between the first plurality of interconnects and the second plurality of interconnects and through the second substrate. The inter-tier interconnect structure includes a first region having substantially vertical sidewalls extending through the second substrate and a second region surrounded by the bonding structure. The second region contacts a bottom of the first region and has tapered sidewalls.

Various embodiments of the present disclosure are directed towards an image sensor. The image sensor includes a photodetector disposed in a semiconductor substrate. An interlayer dielectric (ILD) structure is disposed on a first side of the semiconductor substrate. A storage node is disposed in the semiconductor substrate and spaced from the photodetector, where the storage node is spaced from the first side by a first distance. A first isolation structure is disposed in the semiconductor substrate and between the photodetector and the storage node, where the first isolation structure extends into the semiconductor substrate from a second side of the semiconductor substrate that is opposite the first side, and where the first isolation structure is spaced from the first side by a second distance that is less than the first distance.

Backside illuminated global shutter image sensor

Various embodiments of the present disclosure are directed towards a method for forming a semiconductor structure. The method includes forming a first isolation structure on a first surface of a substrate. A second isolation structure is formed into the first surface of the substrate. Sidewalls of the first isolation structure are disposed laterally between inner sidewalls of the second isolation structure. A bond pad is formed in the substrate such that the second isolation structure continuously laterally wraps around the bond pad.

A semiconductor device comprises a first chip bonded on a second chip. The first chip comprises a first substrate and first interconnection components formed in first IMD layers. The second chip comprises a second substrate and second interconnection components formed in second IMD layers. The device further comprises a first conductive plug formed within the first substrate and the first IMD layers, wherein the first conductive plug is coupled to a first interconnection component and a second conductive plug formed through the first substrate and the first IMD layers and formed partially through the second IMD layers, wherein the second conductive plug is coupled to a second interconnection component.

Interconnect structure and method of forming same

The present disclosure relates to an integrated circuit. The integrated circuit includes a plurality of interconnects within a dielectric structure over a substrate. A passivation structure is arranged over the dielectric structure. The passivation structure has sidewalls connected to one or more upper surfaces of the passivation structure. A bond pad is arranged directly between the sidewalls of the passivation structure. An upper passivation layer is disposed over the passivation structure and the bond pad. The upper passivation layer extends from over an upper surface of the bond pad to within a recess in the upper surface of the bond pad.

The present disclosure relates to a method of forming a semiconductor device structure. The method may be performed by forming a gate structure along a first side of a semiconductor substrate. The semiconductor substrate is thinned. Thinning the semiconductor substrate causes defects to form along a second side of the semiconductor substrate opposing the first side of the semiconductor substrate. Dopants are implanted into the second side of the semiconductor substrate after thinning the semiconductor substrate. The semiconductor substrate is annealed to form a doped layer after implanting the dopants. The doped layer is formed along the second side of the semiconductor substrate.

Semiconductor device structure with back-side layer to reduce leakage

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Tainan, Taiwan

Jeng-Shyan Lin