Taiwan Semiconductor Manufacturing Comp. Ltd.

Jeng-Shiou Chen

Chih-Yuan Ting

Jyu-Horng Shieh

Chung-Wen Wu

Minghsing Tsai

Jang-Shiang Tsai

Ya-Lien Lee

Ming-Hsi Yeh

Chia-Chun Kao

Ming-Hsing Tsai

One or more techniques or systems for mitigating pattern collapse are provided herein. For example, a semiconductor structure for mitigating pattern collapse is formed. In some embodiments, the semiconductor structure includes an extreme low-k (ELK) dielectric region associated with a via or a metal line. For example, a first metal line portion and a second metal line portion are associated with a first lateral location and a second lateral location, respectively. In some embodiments, the first portion is formed based on a first stage of patterning and the second portion is formed based on a second stage of patterning. In this manner, pattern collapse associated with the semiconductor structure is mitigated, for example.

Mitigating pattern collapse

An interconnect structure and a method of forming an interconnect structure are disclosed. The interconnect structure includes a lower etch stop layer (ESL); a middle low-k (LK) dielectric layer over the lower ESL; a supporting layer over the middle LK dielectric layer; an upper LK dielectric layer over the supporting layer; an upper conductive feature in the upper LK dielectric layer, wherein the upper conductive feature is through the supporting layer; a gap along an interface of the upper conductive feature and the upper LK dielectric layer; and an upper ESL over the upper LK dielectric layer, the upper conductive feature, and the gap.

Interconnect structure and method of forming the same

Methods are disclosed herein for forming conductive patterns having small pitches. An exemplary method includes forming a metal line in a first dielectric layer. The metal line has a first dimension along a first direction and a second dimension along a second direction that is different than the first direction. The method includes forming a patterned mask layer having an opening that exposes a portion of the metal line along an entirety of the second dimension and etching the portion of the metal line exposed by the opening of the patterned mask layer until reaching the first dielectric layer. The metal line is thus separated into a first metal feature and a second metal feature. After removing the patterned mask layer, a barrier layer is deposited over exposed surfaces of the first metal feature and the second metal feature and a second dielectric layer is deposited over the barrier layer.

Method of preventing pattern collapse

An interconnect structure and a method of forming an interconnect structure are disclosed. The interconnect structure includes a lower etch stop layer (ESL); an upper low-k (LK) dielectric layer over the lower ESL; a first conductive feature in the upper LK dielectric layer, wherein the first conductive feature has a first metal line and a dummy via contiguous with the first metal line, the dummy via extending through the lower ESL; a first gap along an interface of the first conductive feature and the upper LK dielectric layer; and an upper ESL over the upper LK dielectric layer, the first conductive feature, and the first gap.

A device includes a substrate and at least three conducting features embedded into the substrate. Each conducting feature includes a top width x and a bottom width y, such that a top and bottom width (x, y) of a first conducting feature has a dimension of (x&#x3c;y), a top and bottom width (x, y) of a second conducting feature has a dimension of (x&#x3c;y; x=y; or x&#x3e;y), and a top and bottom width (x, y) of a third conducting feature has a dimension of (x&#x3e;y). The device also includes a gap structure isolating the first and second conducting features. The gap structure can include such things as air or dielectric.

A device includes a substrate and at least three conducting features embedded into the substrate. Each conducting feature includes a top width x and a bottom width y, such that a top and bottom width (x1, y1) of a first conducting feature has a dimension of (x1&#x3c;y1), a top and bottom width (x2, y2) of a second conducting feature has a dimension of (x2&#x3c;y2; x2=y2; or x2&#x3e;y2), and a top and bottom width (x3, y3) of a third conducting feature has a dimension of (x3&#x3e;y3). The device also includes a gap structure isolating the first and second conducting features. The gap structure can include such things as air or dielectric.

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Kaohsiung, Taiwan

Jeng-Shiou Chen