Taiwan Semiconductor Manufacturing Comp. Ltd.

Winbond Electronics Corporation

Jen-Chou Tseng

Wun-Jie Lin

Ming-Hsiang Song

Tzu-Heng Chang

Yu-Ti Su

Ming-Fu Tsai

Ching-Hsiung Lo

Bo-Ting Chen

Jam-Wem Lee

Kuo-Ji Chen

Sun-Jay Chang

Yu-Der Chih

Shao-Yu Chou

Min-Chang Liang

Chia-Wei Hsu

Wan-Yen Lin

Chen-Ming Hung

Shu-Chuan Lee

Alexander Kalnitsky

Han-Jen Yang

Arabinda Das

Li-Wei Chu

Yu-Ying Hsu

Taede Smedes

Johannes Van Zwol

Chien-Fu Huang

Ming Hsien Tsai

Tsung-Che Tsai

Chien-Yuan Lee

Da-Wei Lai

A circuit device includes core circuitry. The circuit device further includes a first plurality of guard rings having a first dopant type, wherein the first plurality of guard rings is around a periphery of the core circuitry. The circuit device further includes a second plurality of guard rings having a second dopant type, wherein the second dopant type is opposite to the first dopant type, and at least one guard ring of the second plurality of guard rings is around a periphery of at least one guard ring of the first plurality of guard rings.

Guard ring and circuit device

Methods and devices are provided herein for enhancing robustness of a bipolar electrostatic discharge (ESD) device. The robustness of a bipolar ESD device includes providing an emitter region and a collector region adjacent to the emitter region. An isolation structure is provided between the emitter region and the collector region. A ballasting characteristic at the isolation structure is modified by inserting at least one partition structure therein. Each partition structure extends substantially abreast at least one of the emitter and the collector regions.

Structure and method for enhancing robustness of ESD device

A method includes implanting a first guard ring around a periphery of core circuitry. The implanting of the first guard ring includes implanting a first component a first distance from the core circuitry on a first side of the core circuitry, and implanting a second component a second distance from the core circuitry on a second side of the core circuitry, wherein the second distance is greater than the first distance. The method further includes implanting a second guard ring around the periphery of the core circuitry. The implanting of the second guard ring includes implanting a third component a third distance from the core circuitry on the first side of the core circuitry, and implanting a fourth component a fourth distance from the core circuitry on the second side of the core circuitry, wherein the third distance is greater than the fourth distance.

Method of forming guard ring and circuit device

A method of making an electrostatic discharge (ESD) testing structure includes forming, in a first die, a first measurement device. The method further includes forming, in a second die, a fuse, a first trim pad, and a second trim pad. The method further includes forming, between the first die and the second die, a plurality of electrical bonds, wherein a first bond of the plurality of bonds is electrically connected to the first trim pad and a first side of the fuse, and a second bond of the plurality of bonds is electrically connected to the second trim pad and a second side of the fuse.

Method of forming electrostatic discharge (ESD) testing structure

A memory device includes a memory circuit and a fuse protection circuit. The memory circuit includes a program line and a fuse. The program line is configured to receive a program voltage for programming the fuse. The fuse protection circuit is coupled to the memory circuit and is configured to prevent unintentional programming of the fuse.

Memory device with a fuse protection circuit

An apparatus includes an interposer and a plurality of dies stacked on the interposer. The interposer includes a first conductive network of a first trigger bus. Each of the plurality of dies includes a second conductive network of a second trigger bus, and an ESD detection circuit and an ESD power clamp electrically connected between a first power line and a second power line, and electrically connected to the second conductive network of the second trigger bus. The second conductive network of the second trigger bus in each of the plurality of dies is electrically connected to the first conductive network of the first trigger bus. Upon receiving an input signal, the ESD detection circuit is configured to generate an output signal to the corresponding second conductive network of the second trigger bus to control the ESD power clamps in each of the plurality of dies.

Method and apparatus of ESD protection in stacked die semiconductor device

Some embodiments relate to a semiconductor device on a substrate. An interconnect structure is disposed over the semiconductor substrate. A first conductive pad is disposed over the interconnect structure. A second conductive pad is disposed over the interconnect structure and spaced apart from the first conductive pad. A third conductive pad is disposed over the interconnect structure and spaced apart from the first and second conductive pads. A first ESD protection element is electrically coupled between the first and second conductive pads. A first device under test (DUT) is electrically coupled between the first and third conductive pads.

ESD hard backend structures in nanometer dimension

A circuit device includes core circuitry. The circuit device further includes a guard ring surrounding the core circuitry. The guard ring includes a first plurality of fin structures arranged in a first direction parallel to a first side of the core circuitry, wherein adjacent fin structures of the first plurality of fin structures are separated by a first distance. The guard ring further includes a second plurality of fin structures arranged in a second direction parallel to a second side of the core circuitry, wherein adjacent fin structures of the second plurality of fin structures are separated by a second distance, and the second distance is smaller than the first distance.

Circuit device including guard ring and method of forming guard ring

A memory device includes a memory circuit and a fuse protection circuit. The memory circuit includes a memory cell and a program line. The memory cell includes a fuse. The program line is configured to receive a program voltage for programming the fuse. The fuse protection circuit is coupled to the memory circuit and is configured to prevent unintentional programming of the fuse.

Some embodiments relate to a semiconductor device on a substrate. An interconnect structure is disposed over the substrate, and a first conductive pad is disposed over the interconnect structure. A second conductive pad is disposed over the interconnect structure and is spaced apart from the first conductive pad. A third conductive pad is disposed over the interconnect structure and is spaced apart from the first and second conductive pads. A fourth conductive pad is disposed over the interconnect structure and is spaced apart from the first, second, and third conductive pads. A first ESD protection element is electrically coupled between the first and second pads; and a second ESD protection element is electrically coupled between the third and fourth pads. A first device under test is electrically coupled between the first and third conductive pads; and a second device under test is electrically coupled between the second and fourth pads.

A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.

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Jhudong, Taiwan

Jen-Chou Tseng