Aluminium Pechiney

Aluminum Pechiney

Airbus Operations (s.a.s.)

Airbus France

Muller, Jean

Jean Muller

Michel Leroy

Franck Delaplace

Didier Ronceray

Bruno Chenal

Didier Graves

Remi Bellouard

The invention concerns a cathode pulverization target characterized in that its active part, i.e. the volume of the target capable of being removed during the cathode pulverization, consists of a high purity aluminum alloy simultaneously containing copper and iron and having simultaneously a recrystallization temperature well above 20&deg; C. and an electric resistivity less than 2.85 &mgr;&OHgr;.cm at 20&deg; C. The use of the target for making bonding circuits reduces the frequency at which voids and hillocks appear, while maintaining the resistance of the bonding circuits at values comparable to the resistance obtained with a high purity aluminum alloy, while also providing the etching characteristics comparable to those of high purity aluminum alloy.

Cathodic sputtering targets made of aluminum alloy

A process using ultrasonic inspection for testing the internal soundness of cathode sputtering targets, whose active part is made of aluminum with a very high degree of purity or a very pure aluminum alloy, consisting, after selection of an ultrasound sensor functioning at an operating frequency greater than 5 MHz, preferably between 10 and 50 MHz, and adjusting the appropriate measurement sequence, using a target immersed in a liquid and which has ceratin artificial defects simulating decohesions in the target, taking a count in terms of size and number of the internal decohesions per unit volume and selecting, for the applications requiring a very high degree of etching fineness, the targets with a decohesion density of .ltoreq.0.1 decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target, and cathode sputtering targets selected according to the process having no more than 0.1 internal decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target.

Cathode sputtering targets selected by ultrasonic inspection for their

A process is provided for ultrasonic testing the internal soundness of cathode sputtering targets including an active part made of very pure aluminum or of very pure aluminum alloy. In particular, this process, after the choice of an ultrasound sensor functioning at an operating frequency greater than 5 MHZ, and preferably between 10 and 50 MHZ, and adjustment of the appropriate measurement sequence, using a target immersed in a liquid and having certain artificial defects simulating the decohesions in the target, consists of taking a count in terms of size and number of the internal decohesions per unit volume and of selecting the targets with a decohesion density of .ltoreq.0.1 decohesion larger than 0.1 mm per cm.sup.3 of active metal of the targets, and preferably less than 0.1 decohesion larger than 0.04 mm per cm.sup.3 of active metal. The process also pertains to selecting precursors of the cathode sputtering targets, containing less than 0.1 internal decohesion larger than 0.04 mm per cm.sup.3.

Cathode sputtering targets with a low level of particle emission,

Growing community of inventors

Voiron, France

Jean Muller