Average Co-Inventor Count = 1.33
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ctp Gmbh (2 from 6 patents)
2. European Community (ec) (1 from 14 patents)
3 patents:
1. 6554953 - Thin film electrostatic shield for inductive plasma processing
2. 6321681 - Method and apparatus to produce large inductive plasma for plasma processing
3. 6312555 - Thin film electrostatic shield for inductive plasma processing