Imec Vzw

Universiteit Antwerpen

Jan De Beenhouwer

Wilfried B Vandervorst

Jan Sijbers

Yu-Ting Ling

A method for determining a three-dimensional atomic distribution of a sample having a tip, during an atom probe tomography process. The method accounts for the tip not being axial symmetric and not having a hemispherical shaped apex throughout the evaporation process.

Reconstruction method for atom probe tomography

A computer-implemented method for obtaining dark-field X-ray projection data of an object includes: obtaining a first set of X-ray projection data of the object at a first energy spectrum; the first set of X-ray projection data having a first attenuation component, a first phase component, and a first dark-field component; obtaining a second set of X-ray projection data of the object acquired at a second energy spectrum having a higher effective energy than the first energy spectrum; and extracting the dark-field projection data from the first set of X-ray projection data by the second set of X-ray projection data having a lower dark-field component contribution than the first set of X-ray projection data.

Phase-contrast X-ray imaging system for obtaining a dark-field image and a method therefor

A method is provided for inspection of an item comprising acquiring a projection image of the item using a radiation imaging system and obtaining a plurality of simulated projection images of the item or a component thereof, based on a simulation of a numerical three-dimensional model. A relative orientation of the item with respect to the imaging system is determined by comparing the projection image to the plurality of simulated images, and at least one angle of rotation is determined by taking into account a viewing angle and the relative orientation. The method further comprises moving the item and/or the imaging system in accordance with the at least one angle of rotation and acquiring a further projection image of the item.

Item inspection by dynamic selection of projection angle

A method and system for inspection of an item, and a use thereof, are presented. The method comprises acquiring a plurality of projection images of an item at a plurality of projection angles for performing a tomographic reconstruction of the item. A plurality of objects are detected in the tomographic reconstruction and each object has a generic shape described by a parametric three-dimensional numerical model. Said detection comprises determining initial estimates of position and/or orientation of each object and at least one geometrical parameter of the three-dimensional model for each object. The initial estimates are iteratively refining by using a projection-matching approach, in which forward projection images are simulated for the objects according to operating parameters of the radiation imaging device and a difference metric between acquired projection images and simulated forward projection images is reduced at each iteration step.

Growing community of inventors

Geraardsbergen, Belgium

Jan De Beenhouwer