Other

University of California

Jan Arild Tofte

Andrew William Jackson

Arthur Charles Gossard

Paul Ruengrit Pinsukanjana

John H English

Scott A Chalmers

An integrated dual beam multi-channel optical-based flux monitor and method of monitoring atomic absorption of a plurality of atomic species during epitaxial growth. Light from multiple sources is simultaneously passed through a region of deposition of material such that atomic absorption takes place. The light that passed through the region is then compared to light in a reference arm that did not pass through a region of atomic absorption. From this comparison the growth of an epitaxial layer can be carefully controlled.

Integrated multi-channel optical-based flux monitor and method

An integrated dual beam multi-channel optical-based flux monitor and method of monitoring atomic absorption of a plurality of atomic species during epitaxial deposition. Light from multiple sources is simultaneously passed through a region of deposition of material such that atomic absorption takes place. The light that passed through the region is then compared to light in a reference arm that did not pass through a region of atomic absorption. From this comparison the deposition of an epitaxial layer can be carefully monitored and controlled.

Method of controlling multi-species epitaxial deposition

Growing community of inventors

Goleta, CA, United States of America

Jan Arild Tofte